Dual Gate Microsensors and Nanomaterials for Chemical Detection

Abstract

New chemical sensors are developed for suitable applications in biochemistry and biology, especially for the easy measurement of low concentrations of chemical and biological elements in liquid media. Robust devices, able to detect a small charge variation, can be associated with nanomaterials on the active surface of the sensor. Sensors based on microelectronic technologies and having high sensitivities due to their specific Dual Gate structure are shown. We demonstrate that, under optimum polarization conditions, the sensor exhibits a high sensitivity for pH variations. The integration of several types of nanomaterials on the active surface of the microsensors is also demonstrated and validated for further biological detections.