Dual-frequency piezoelectric micromachined ultrasound transducer based on polarization switching in ferroelectric thin film

Abstract

Dual-frequency ultrasound has advantages over conventional ultrasound, which operates at a specific frequency band, due to its additional frequency response. Moreover, a tunable frequency from a single transducer enables sonographers to achieve ultrasound images with a large detection area and high resolution. This facilitates the availability of more advanced techniques that require low- and high frequency ultrasound simultaneously such as harmonic imaging and image-guided therapy. In this article, we present a novel method for dual-frequency ultrasound generation from a ferroelectric piezoelectric micromachined ultrasound transducer (PMUT). Uniformly designed transducer arrays can be used for both deep low-resolution imaging and shallow high-resolution imaging. To switch the ultrasound frequency, the only requirement is to tune a DC bias for controlling the polarization state of the ferroelectric film. Flextensional vibration of the PMUT’s membrane strongly depends on the polarization state, producing low- and high-frequency ultrasound from a single excitation frequency. This strategy for dual-frequency ultrasound dispenses with the requirement for either multi-electrode configurations or hetero-designed elements, which are integrated into an array. Consequently, this technique significantly reduces the design complexity of transducer arrays and their associated driving circuits.