Dual-Detections of Tactile Force and Proximity with an Ultra-Sensitive Integrated Microcantilever Sensor

Liu, Yi; Zhu, Xincheng; Lin, Cong; Miao, Jiahao; Zhou, Zhanxuan; Wang, Xueliang; Yu, Xiaomei

doi:10.1109/mems58180.2024.10439588

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) 2024

DOI: 10.1109/mems58180.2024.10439588

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Dual-Detections of Tactile Force and Proximity with an Ultra-Sensitive Integrated Microcantilever Sensor

Yi Liu,

Xincheng Zhu,

Cong Lin

et al.

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Dual-Detections of Tactile Force and Proximity with an Ultra-Sensitive Integrated Microcantilever Sensor

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