Dry Surface Micromanipulation Using An Untethered And Magnetic Microrobot

Abstract

Precise micromanipulation tasks are typically performed using micromanipulators that require an accessible workspace to reach components. However, many applications have inaccessible or require sealed workspaces. This paper presents a novel magnetically-guided, and untethered, actuation method for precise and accurate positioning of microcomponents on dry surface within a remote workspace using a magnetic microrobot. By use of an oscillatory and uniform magnetic field, the magnetic microrobot can traverse on a dry surface with fine step size and accurate open-loop vector following, 3% and 2% of its body-length, respectively (step size of 7 μm). While maintaining precise positioning capability, the microrobot can manipulate and carry other microcomponents on the dry surface using direct pushing or grasping using various attachments, respectively. We demonstrate and characterize the untethered micromanipulation capabilities of this method using a 3 mm cubic microrobot for use in applications such as microassembly and cargo transport.