DRS U6000 640x480 VO x uncooled IR focal plane

Howard, Philip N.; Clarke, John Elwood; Ionescu, A; Li, Chuan C.; Stevens, John C.

doi:10.1117/12.478860

Cited by 7 publications

(3 citation statements)

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“…De hautes performances sont démontrées par cette filière et le challenge actuel est d'être capable de réduire la dimension des pixels jusqu'à environ 25 µm. Raytheon [1] et DRS [2] développent des structures complexes à double couches suspendues tandis que BAe, dans un pixel au pas de 28 µm reste fidèle à une structure à simple couche plus traditionnelle [3].…”

Section: Filière « Oxyde De Vanadium »unclassified

La détection infrarouge avec les plans focaux non refroidis : état de l'art

Tissot¹

2003

Comptes Rendus. Physique

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Présenté par Guy Laval RésuméL'émergence des détecteurs infrarouge non refroidis a ouvert de nouvelles opportunités pour la détection infrarouge tant dans les applications civiles que militaires. Le développement de tels détecteurs doit répondre à des contraintes diverses dont la plus importante est d'utiliser un thermomètre performant et un processus d'intégration utilisant des techniques de la microélectronique silicium. Le CEA/LETI a choisi dès les débuts du développement d'intégrer à l'aide de la technologie silicium un thermomètre résistif sur un circuit CMOS issu d'une filière commercialement disponible. Cette seule approche a un potentiel de coût de fabrication très réduit par rapport aux technologies concurrentes. La technologie a été transférée à la société Sofradir qui a ensuite externalisé cette activité dans sa filiale ULIS. Le CEA/LETI et ULIS travaillent maintenant à l'amélioration des performances de la filière pour permettre la réalisation de composants de faibles dimensions économiquement plus accessibles à de nombreuses applications. Nous présentons dans cet article une revue de l'état de l'art dans le monde ainsi que les nouveaux produits en cours de développement à ULIS.

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Section: Filière « Oxyde De Vanadium »unclassified

La détection infrarouge avec les plans focaux non refroidis : état de l'art

Tissot¹

2003

Comptes Rendus. Physique

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“…High performance is already demonstrated with this technology and the challenge is now to be able to reduce the pixel pitch down to 25 µm. First results are shown by Raytheon [1] and DRS [2] with a pixel pitch of 25 µm and a double deck structure and by BAe with a pixel pitch of 28 µm and a more conventional simple deck structure [3]. The second challenge is to suppress the focal plane temperature stabilization in order to simplify the detector integration in camera.…”

Section: Three Technologies Exist In Usamentioning

confidence: 99%

Uncooled IR focal plane arrays: worldwide review and state-of-the-art at ULIS

Tissot¹

2002

Proceedings of the 2002 International Conference on Quantitative InfraRed Thermography

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Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Developments are focused on improving the sensitivity to enable the possibility to manufacture high performance small pixel pitch detectors or radiometric detectors with internal "cold" shield. Commercial infrared is now a well-established business with several competitors. We review the state-of-art of the main competitors and we describe the work which is being done in France.After the development of an amorphous silicon based uncooled microbolometer technology, LETI and ULIS, a subsidiary of SOFRADIR and CEA, are now working to make easier IRFPA integration into equipment in order to address a very large market. Achievement of this goal needs the integration of advanced functions on the focal plane and the decrease of manufacturing cost of IRFPA by decreasing the pixel pitch and simplifying the vacuum package. We present the new design for readout circuits taking into account the user needs by introducing analog to digital converter on the chip to provide 12 bits video digital output. We present also the introduction and the characterization of radiometric device obtained from 320 x 240 uncooled microbolometer arrays with a f/1.4 limited field of view. Then, we present the new ceramics microbolometer package developed to decrease the package cost of versatile smaller devices like the 160 x 120 pixels with a pitch of 35 µm.

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“…Figure 4 is an example SEM of foundry-processed bolometer with leg widths of <0.0.2 μm for single-level and multi-level designs. [7][8][9] There is, however, a significant design and process challenge for microbolometer designs <17 μm. Specifically, with as much as a 15× to 25× reduction in pixel area from the initial 50-μm designs, there is a proportional increase in NETD (Sec.…”

Section: Limiting Factors For Performance Of Smallmentioning

confidence: 99%

Uncooled long-wave infrared small pixel focal plane array and system challenges

et al. 2013

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Abstract. There is a strong motivation for smaller pixels based on enduser demand for lower-cost, higher-resolution camera systems both for military and commercial applications. Uncooled detector technology fits the need for a low size, weight, and power system. We explore the tradeoffs and challenges to achieving pixel designs smaller than the current 17-μm state-of-the-art detectors without loss in sensitivity or resolution. For illustration we consider a 12-μm design. We also address modulation transfer function issues as the pixel size shrinks, and examine the difference between the performance of present devices and the theoretical performance limit for uncooled detectors. IntroductionFifteen to 20 years ago, developments in the semiconductor industry enabled the earlier generations of uncooled focal plane array (FPAs) and cameras with small format, 160 by 120 and then 320 by 240 array sizes with large pixels, generally in the neighborhood of 50 × 50 μm 2 . The detector material was usually vanadium oxide (VOx), alpha-silicon (a-Si) or ferroelectrics. The wave band over which the optics and detectors of a camera were generally designed to receive and respond to radiation that is approximately 7.5 AE .0.5 μm 2 to 13 AE 1 μm 2 . The user community, mainly the military at that time, specified camera operational requirements, which were typically around a 50-mK noise equivalent temperature difference (NETD), a frame rate of 30 Hz, and commensurate time constants for applications such as a thermal weapons sight or helmet-mounted goggles. The sensitivity of the detectors was far from the fundamental limits and thus drove the need for optics with an F/number near 1.0 to obtain the desired NETD. The modulation transfer function (MTF) of the system was almost never dominated by the MTF of the optics. Over the years, the semiconductor industry has made advances with ever smaller design rules, enabling the uncooled camera manufacturers to further push their designs and performance. Pixel sizes have been reduced from 50 to ∼25 μm, then to 17 μm, and today uncooled camera manufacturers are looking into developing FPAs with pixels in the range of 10 to 13 μm while also increasing the resolution of the arrays to a nominal 1 K × 1 K format.1,2 The user-desired operational specifications generally require a 35-to 50-mK NETD and a 10-to 12-ms time constant with a frame rate of 30 or 60 Hz. A nominal F/1 optic is still required to obtain this sensitivity. There is also interest in further shortening the time constant to 5 ms or less while maintaining good NETD performance for higher speed motion applications. This raises a number of considerations, practical and theoretical, related to the benefits of making uncooled detector pixels much smaller than 17 μm. This paper explores some of those considerations.

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DRS U6000 640x480 VO x uncooled IR focal plane

Cited by 7 publications

References 0 publications

La détection infrarouge avec les plans focaux non refroidis : état de l'art

La détection infrarouge avec les plans focaux non refroidis : état de l'art

Uncooled IR focal plane arrays: worldwide review and state-of-the-art at ULIS

Uncooled long-wave infrared small pixel focal plane array and system challenges

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