Driver ASIC for synchronized excitation of resonant micromirrors

Roscher, Kai-Uwe; Fakesch, Uwe; Schenk, Harald; Lakner, Hubert; Schlebusch, Dirk

doi:10.1117/12.477810

Cited by 18 publications

(8 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…After approximately a quarter period (when the mirror is at the point of maximum deflection) the voltage is switched on again. While the switch-off point is very delicate, the timing of the switching-on is not so critical, since the overlap between the mirror edges and the frame and, as a consequence, the forces at this point are small [6]. In this driving mode, the mirror will automatically be driven with twice the resonance frequency, albeit eventually with a certain deviation from 50% duty cycle.…”

Section: Moems Device Electrostatic Driving Principlementioning

confidence: 97%

“…In a recent paper [6] the capacitance variance was used to detect the zero-transition of resonant MOEMS mirrors and to perform synchronized excitation. This was demonstrated using an especially designed integrated circuit and a 250 Hz mirror.…”

Section: Moems Device Electrostatic Driving Principlementioning

confidence: 99%

“…for high frequency devices, where synchronized excitation [6] is difficult. In addition the amplitude is stabilized by controlling the driving voltage.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Position encoding and phase control of resonant MOEMS mirrors

Tortschanoff

Lenzhofer

Frank

et al. 2010

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Section: Moems Device Electrostatic Driving Principlementioning

confidence: 97%

Section: Moems Device Electrostatic Driving Principlementioning

confidence: 99%

See 1 more Smart Citation

Position encoding and phase control of resonant MOEMS mirrors

Tortschanoff

Lenzhofer

Frank

et al. 2010

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

“…Last but not least it can be used for quality control of the MOEMS mirrors. The deflection angle can be detected via the capacitance change at the driving electrodes (Roscher et al 2003;Wang and Flanders 2003;Kuijpers et al 2009;Hofmann et al 2011), piezo-resistive position sensors integrated in the silicon mirror dye (Yalcinkaya et al 2006;Grahmann et al 2009;Grahmann et al 2011) or optical detection methods. Mirror inspection via interference microscopy (Grigg et al 2004) is very precise but bulky and costly.…”

Section: Introductionmentioning

confidence: 99%

Theoretical Aspects in the Design of Optical Angular Position Sensing of Tiltable Mirrors

Baumgart

Tortschanoff

2013

International Journal of Optomechatronics

View full text Add to dashboard Cite

Tiltable mirrors, which can be produced in small form factors via MOEMS technology, are widely used for many applications. An independent, accurate and fast feedback of the angle position is demanded by industry. Simple optical tilt angle sensing layouts are analytically described. The concept is based on measuring tilt angle dependent intensity or intensity differences. The performance limits of each layout are evaluated and derived design rules for the best linear behavior are given.

show abstract

“…The angular position of the grating is encoded by an optical trigger signal combined with a harmonic extrapolation function to correlate the tilt-angle with the wavelength. In future the use of a capacitance signal from the driving electrodes [5] will make the optical trigger obsolete.…”

Section: Spectrometer Assemblymentioning

confidence: 99%

A compact spectrometer based on a micromachined torsional mirror device

Kenda

Scherf

Hauser

et al.

Proceedings of IEEE Sensors, 2004.

View full text Add to dashboard Cite

In this paper we describe a spectrometer employing a micro electro mechanical system (MEMS). A torsional micro mirror device which was originally designed for laser scanner applications has been modified accordingly to act as a diffraction grating in a Czerny-Turner setup. This spectrometer system combines the working principle of a scanning monochromator with the compactness of a microsystem. The micro mirror device is operated in a harmonic scanning mode at a resonance frequency of 500 Hz, enabling the system to acquire a spectrum per half cycle in one millisecond. Spectra of a calibration source in the visible and near-infrared spectral range as well as simulations concerning the optical system demonstrate the performance of the spectrometer. INTRODUCTIONThe today's market of micro-spectrometer systems for the visible (VIS) and near-infrared (NIR) spectral ranges is ruled by devices which are working with fixed diffraction gratings in combination with detector arrays. Even though this type of spectrometer system yields robust and low cost devices especially for VIS applications, it has a few disadvantages. Changing the wavelength range for example would implicate a replacement of the grating. The spectral range and the resolution of the spectrometer is defined by the diffraction grating as well as by the number and size of the pixels of the detector array. Scanning monochromator systems are more flexible but the essential complex driving mechanism usually consumes space and causes costs. A micro electro mechanical system (MEMS) based system would combine the versatility of a scanning monochromator with the compactness and the ruggedness of a microspectrometer.

show abstract

Driver ASIC for synchronized excitation of resonant micromirrors

Cited by 18 publications

References 0 publications

Position encoding and phase control of resonant MOEMS mirrors

Position encoding and phase control of resonant MOEMS mirrors

Theoretical Aspects in the Design of Optical Angular Position Sensing of Tiltable Mirrors

A compact spectrometer based on a micromachined torsional mirror device

Contact Info

Product

Resources

About