Driveless Gyroscope Response of a Quartz Piezoelectric Vibratory Tuning Fork

Abdel‐Rahman, M.; Albassam, Bassam A.; Alduraibi, M.

doi:10.12693/aphyspola.127.1352

Cited by 3 publications

(3 citation statements)

References 4 publications

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“…So, we are focusing on the analyses of base shape to get proper shape and dimension of base in order to meet requirement of tight space and good electric characteristic. Quartz tuning fork have been widely used in sensor, AFM and gyroscope [8][9][10][11].…”

Section: Icpmmt 2017mentioning

confidence: 99%

A study of small sized quartz tuning fork using finite element analysis

Tsai

2017

MATEC Web Conf.

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Abstract. This is a preliminary study to small sized quartz tuning fork operating at 32.768 kHz for several types of supporting structure. Tine length and tine width can be calculated by Euler-Bernoulli equation (Exact Solution), but the base shall be analyzed by FEM (Approximation Solution) due to flexibility of base design. Finite Element Method (FEM) software ANSYS is used to simulate quartz tuning fork to extract electric response from harmonic analysis. Several types of supporting structure are to compare to modified tuning fork with notch by simulation.

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Section: Icpmmt 2017mentioning

confidence: 99%

A study of small sized quartz tuning fork using finite element analysis

Tsai

2017

MATEC Web Conf.

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“…In summary, vibrating gyroscopes can be classified into various structural shapes, such as cubical, disk, and ring shapes, and their advantages and disadvantages were discussed in [1,2]. Cubical mass structures [3][4][5][6][7], including single mass [3], dual-mass [4], tuning fork structures [5,6], and quadrilateral mass structures [7], have limitations due to the coupling of the driving and sensing axes [3][4][5][6]. Using a higher number of masses can mitigate the coupling effect but may add complexity to the fabrication and measurement of system performance.…”

Section: Introductionmentioning

confidence: 99%

Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

Khan,

Ranji,

Nagesh

et al. 2023

Sensors

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This paper presents a novel single-ring resonator design and experimentally demonstrates its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor at its center connected to an outside ring via inner ring-shaped springs. The mode shapes and frequency of the ring resonator were determined numerically and compared with analytical approaches, and the minimum split frequency was observed for the n = 3 mode of vibration. Numerical and analytical methods were used to determine the resonance frequencies, pull-in voltage, resonance frequency shift and harmonic response of the ring resonator for different silicon orientations. The split frequency in the n = 3 mode of vibration increases by the applied DC bias voltage almost by the same amount for all types of silicon. When an AC voltage with a 180-degree phase is applied to two opposite electrodes, the ring has two resonance frequencies in mode n = 2, and when the AC voltage applied to two opposite electrodes is in the same phase, the ring has one resonance frequency regardless of the crystal orientation of silicon. Prototypes were fabricated using a double silicon-on-insulator-based wafer fabrication technique and were tested to verify the resonator performance.

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“…The latter include various types of Coriolis Vibratory Gyros (CVG) with shell resonators in the form of a ring, a hemisphere, a cylinder, and other shapes (for example, birdbath) [2][3][4][5][6], as well as other solid-state gyroscopes with disk, rod, and beam resonators, etc. including the ones in the form of a tuning fork [7][8][9][10][11]. For such devices, the isotropy of the mechanical properties of fused silica and its ability for low dissipation of mechanical energy are of high priority [12].…”

mentioning

confidence: 99%

Fabrication of Tuning-Fork Gyroscope Resonator using Directed Chemical Etching of Fused Silica

Kuznetsov¹,

Maiorov

Andreev

2019

HoBMSTU.SIE

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The article presents the results of the experimental and practical work devoted to the study of directed chemical etching of fused silica locally exposed to ultra-short pulsed laser radiation as a way to produce sensitive elements of precision instruments of orientation, stabilization and navigation as resonators of tuning fork gyroscopes. The essence of the directed chemical etching method is presented. The created experimental setup structure and components are purposed and the laser processing and chemical etching operational modes are described. The laser processing mode obtained as a result of the experiment was used to fabricate the tuning fork gyroscope resonator. The etching rate of exposed fused silica in 5 % hydrofluoric acid is 27.5 to 68.8 µm/hour. That is much faster than the etching rate of the non-affected material. Based on this results the application of the method in the precision instruments fabrication area can be considered promising and subjected to further study.

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Driveless Gyroscope Response of a Quartz Piezoelectric Vibratory Tuning Fork

Cited by 3 publications

References 4 publications

A study of small sized quartz tuning fork using finite element analysis

A study of small sized quartz tuning fork using finite element analysis

Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

Fabrication of Tuning-Fork Gyroscope Resonator using Directed Chemical Etching of Fused Silica

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