Double stage FPCB scanning micromirror for laser line generator

Zuo, Haoyi; He, Siyuan

doi:10.1016/j.mechatronics.2018.03.005

Cited by 14 publications

(15 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We can observe that the sensor output signal is nearly in phase with the driving signal. The small phase difference of 5.1° is caused by the superposed coupling signal in the sensing coil, and it is close to the theoretical value of 4.4° calculated by Equation (14). Meanwhile, the coupling signal in the sensing coil has a phase difference of 89.6° with the driving signal, which is also very close to the theoretical value of 90° calculated from Equation (11).…”

Section: Principle and Modelingsupporting

confidence: 81%

“…where ϕ is the phase difference between the output voltage U s and the moving-induced electromotive force ε s . Equations (13) and (14) give the relationship of the output voltage of the sensor and the deflection angle of the micromirror considering the coupling effect in theory. Figure 3a shows the schematic drawing of the measurement setup of the angle sensor.…”

Section: Principle and Modelingmentioning

confidence: 99%

“…However, conventional Si-based MEMS (microelectromechanical systems) micromirrors cannot meet the requirements because large-aperture and low-frequency Si micromirrors are fragile, and cannot survive the environmental shocks and vibrations [8,11]. In comparison, flame retardant 4 (FR4)-based micromirrors are more promising, due to the inherent flexibility of FR4 [7,[12][13][14]. Until now, FR4 is the most widely used material for printed circuit boards (PCBs).…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Wen

Lei

et al. 2018

Applied Sciences

View full text Add to dashboard Cite

This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.

show abstract

Section: Principle and Modelingsupporting

confidence: 81%

Section: Principle and Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Wen

Lei

et al. 2018

Applied Sciences

View full text Add to dashboard Cite

show abstract

“…However, the second type needs to bond the mirror plate onto a released and fragile micro actuator, which is very difficult and then leads to a low bonding yield due to the low strain limit of the silicon flexible structure. In order to overcome this problem, flexible printed circuit board (FPCB) micromirrors were proposed and developed in [23,24,25,26] by the authors of the present paper, which have the mirror plate bonded to the FPCB structure. The flexible parts of FPCB structure are the polyimide layer or polyimide plus copper film laminate layer, which has a higher strain limit than silicon.…”

Section: Introductionmentioning

confidence: 99%

“…Those FPCB micromirrors share the same advantages as the second type of MEMS micromirrors, i.e., a large aperture and high flatness. Two driving methods are used for those FPCB micromirrors, i.e., electrostatic [23,24,25] and magnetic with the configuration of “moving coil plus external permanent magnet (PM)” [26].…”

Section: Introductionmentioning

confidence: 99%

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

Periyasamy

Tan

et al. 2019

Micromachines

Self Cite

View full text Add to dashboard Cite

An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the overall width beyond the mirror plate, and (2) increases the maximum rotation angle. The micromirror has two external electromagnets underneath an FPCB structure (two torsion beams and a middle seat) with two moving PM discs attached to the back and a metal-coated mirror plate bonded to the front of the FPCB middle seat. Modeling and simulation were introduced, and the prototype was fabricated and tested to verify the design. The achieved performance was better than that of the previous design: a maximum resonant rotation angle of 62° (optical) at a driving voltage of ±3 V with a frequency of 191 Hz, the required extra width beyond the mirror plate was 6 mm, and an aperture of 8 mm × 5.5 mm with a roughness of <10 nm and a flatness of >10 m (ROC, radius of curvature). The previous FPCB micromirror’s performance was: strain limited maximum rotation angle was 40° (optical), the extra width beyond the mirror plate was 14.7 mm, and had an aperture of 4 mm × 4 mm with a similar roughness and flatness.

show abstract

3D LIDAR based on FPCB mirror

Tai

Zuo

2022

Mechatronics

View full text Add to dashboard Cite

Double stage FPCB scanning micromirror for laser line generator

Cited by 14 publications

References 30 publications

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

3D LIDAR based on FPCB mirror

Contact Info

Product

Resources

About