Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors

Nastro, Alessandro; Ferrari, Maurizio; Ferrari, Vittorio

doi:10.1016/j.sna.2020.112127

Cited by 24 publications

(18 citation statements)

References 28 publications

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“…However, the range is not changed since the sensor stiffness remains unchanged. Moreover, some MEMS force sensors adopted the active-drive and position-feedback method to achieve an adjustable range and sensitivity [25], [26], where the drive is always powered during force measurement.…”

Section: Introductionmentioning

confidence: 99%

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A Variable Configuration Force Sensor With Adjustable Resolution for Robotic Applications

Sun

Chen

Xiong

et al. 2023

IEEE Trans. Ind. Electron.

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Multitask measurements with different measuring ranges and resolutions have put forward higher requirements for force sensors. This paper presents a novel variable configuration approach to develop an adjustableresolution force sensor with a compact force-sensitive structure. Unlike the traditional strain gauge-based force measurement, the external force is detected through measuring the displacement of the deformed structure with a precision optical linear encoder. This approach can enable variable measuring range and force resolution through the continuous adjustment of structural stiffness. Specifically, the stiffness adjustment is implemented by changing the second moment of area of the sensor structure through rotating its build-in flexure beam shafts. Analytical models are established to provide the theoretical basis for analysis and design of the sensor. Further, the validity of the design is evaluated with finite element simulations. Finally, a sensor prototype is developed for performance evaluation and applied for the wire bond pull tests to evaluate the bond strength on the printed circuit board assembly. Experimental results show that it is effective to change the measuring range and force resolution of the developed force sensor through the stiffness adjustment.

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Section: Introductionmentioning

confidence: 99%

“…[20],[21] Simple structure Unadjustable performance Analog output signal[22],[23] Adjustable performanceRepeated installation and calibrationComplex adjustable operation Discontinuous and limited adjustment Analog output signal[24]-[26] Adjustable performance Limited adjustment Continuous adjustment Extra actuator[25],[26] …”

mentioning

confidence: 99%

A Variable Configuration Force Sensor With Adjustable Resolution for Robotic Applications

Sun

Chen

Xiong

et al. 2023

IEEE Trans. Ind. Electron.

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“…Recently, comb actuators were introduced to fulfill a nulling mechanism that deflected sensor structures can be driven back by the applied actuated voltage. A capacitive force sensor with double sets of comb actuators has been developed [30], the device has a high force sensing sensitivity of 8.43 V/µN and resolution of 0.3450 nN, but its force measurement range was highly limited within 21.4 nN. Besides, complicated control circuits [31,32] and precise parameters estimation [33,34] are necessary to obtain a propel driving signal in these closed-loop position-feedback measurement approaches.…”

Section: Introductionmentioning

confidence: 99%

An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement

Gao

Liu

et al. 2022

Measurement

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“…A proper driving signal should be computed and applied to the actuators, leading to a slow signal response [30], [31]. One alternative is utilizing an additional actuator to adjust the working position independently [32], [33]; the force resolution of such devices can reach 0.514 nN. However, this phenomenon can only occur within a small measurement range of 0.230 µN.…”

Section: Introductionmentioning

confidence: 99%

A high resolution capacitive MEMS force sensor with novel bionic swallow comb arrays for multiphysics measurement

Gao¹

2022

Preprint

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Precise force sensing is essential for the mechanical characterization and robotic micromanipulation of biological<br>targets. In this work, a high-resolution MEMS capacitive force sensor was proposed for measuring ultralow multiphysics. A bionic swallow structure that contained multiple feathered comb arrays was designed for reducing chip dimension and eliminating undesirable mechanical cross-coupling effect. The comb structure was optimized for maximum sensitivity, linearity, and compact chip size. Utilizing a novel interconnection configuration, interferences derived from parasitic capacitance and electrostatic forces exerted negligible effects on the sensor output. The proposed bionic force sensor was fabricated following a simple three-mask process and integrated with ASIC readouts. Its measuring sensitivity was 7.151 fF/nm, 0.529 aF/nN, and 4.247 pF/g for displacement, force, and inclination measurements, respectively. The proposed sensor had a large measurement range of 1000.00 nm and 13.83 µN with a high linearity of 0.9998. The 1-σ resolution was 0.0328 nm and 0.4436 nN, and the noise floor resolution was 0.0044 nm √? and 0.0597 nN/ √? for<br>displacement and force measurements, respectively. The bias stability of Allan deviance was 0.0050 nm and 0.0678 nN at an integration time of 0.65 s. The proposed bionic swallow sensor exhibited considerable improvement over existing capacitive sensors and feasibility for ultralow multiphysics measurement in biomedical applications. <br>

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Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors

Cited by 24 publications

References 28 publications

A Variable Configuration Force Sensor With Adjustable Resolution for Robotic Applications

A Variable Configuration Force Sensor With Adjustable Resolution for Robotic Applications

An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement

A high resolution capacitive MEMS force sensor with novel bionic swallow comb arrays for multiphysics measurement

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