Dose influence on the PMMA e-resist for the development of high-aspect ratio and reproducible sub-micrometric structures by electron beam lithography

Veroli, Andrea; Mura, Francesco; Balucani, M.; Caminiti, Ruggero

doi:10.1063/1.4954493

Cited by 6 publications

(3 citation statements)

References 25 publications

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“…The smallest geometric dimension of the system was the width of the comb-drive fingers (600 nm); in order to reach it, a sub-micrometric lithographic resolution is required: the geometries definition was carried out using Electron Beam Lithography (EBL) on an e-resist polymeric film [44].…”

Section: Fabricationmentioning

confidence: 99%

An Interdisciplinary Approach to the Nanomanipulation of SiO2 Nanoparticles: Design, Fabrication and Feasibility

et al. 2018

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Although some recent developments in nanotechnology made the prospects of a direct mechanical manipulation of micro-or nano-objects quite realistic, there are still several concerns and difficulties that affect such an endeavor. This is probably due to the large base of knowledge that is necessary to approach the problem of handling a nano-object by means of a nano-or micro-device. Therefore, any progress in this field is possible only by means of an integrated and interdisciplinary approach, which takes into account different aspects of the phenomenon. During the actual pioneering phase, there is a certain convenience in handling nano-objects that: (a) have peculiar known characteristics; (b) are easily recognizable, and (c) are interesting to the scientific community. This paper presents the interdisciplinary activities that were necessary to set up an experiment where specifically synthesized SiO 2 particles came in contact with the tips of specifically-designed and -fabricated nanomanipulators. SiO 2 mesoporous nanoparticles (KCC-1), having a peculiar dendritic structure, have been selected as a suitable nano-object because of the possibility to easily modulate their morphology. The expected contact force has been also calculated by means of Finite Element Analysis (FEA) electro-mechanical simulations.However, further miniaturization to the nano-scale is still possible, although there are still several severe concerns [23,24], and therefore, the study of the action of grasping a nanoparticle by means of a nano-gripper remains difficult under many points of view.Since, at the nanometric scale, materials behave quite differently from the bulk, understanding the size and shape dependence of physical properties in nanoparticles is a fundamental step towards the design, fabrication, and assembly of materials and devices with predictable behavior. In particular, the mechanical properties of nanoparticles may be of fundamental importance in controlling their performances in specific applications. Mechanical characterization of nanoparticles presents several challenges, it being difficult to prepare isolated nanoparticles on a substrate and to locate one individual nanoparticle. It is even more challenging to apply the required low loads on the nanoparticles, to measure the small deformations produced and to interpret the experimental data. Nano-indentation and Atomic Force Microscopy (AFM) are two common tools used for the mechanical characterization at the nanoscale level [25][26][27][28].Actually, the contacts between nano-gripper jaws and nanoparticles, with possible mechanical characterization of the nanoparticles, is still a rather unexplored field. Some techniques have been applied by means of AFM [29][30][31] or nano-indenters [32].This investigation presents the feasibility study of a nano-gripper to be used for the mechanical characterization of isolated nanoparticles. Firstly, the synthesis procedure and the morphological characterization by Scanning Electron Microscope (SEM) and Brunauer-Emmett-Teller (BE...

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Section: Fabricationmentioning

confidence: 99%

An Interdisciplinary Approach to the Nanomanipulation of SiO2 Nanoparticles: Design, Fabrication and Feasibility

et al. 2018

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“…Electron Beam Lithography (EBL) was required, in order to obtain submicrometric resolution, on 157 an electron-sensible polymeric film [44]; A glow discharge with a power density of 25 mW/cm 2 , for 1 h.…”

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confidence: 99%

An Approach to the Extreme Miniaturization of Rotary Comb Drives

et al. 2018

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The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication.

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“…Typically, exposure dose ranges from 1 to 10 μC/cm2. In comparison, popular EBL resists such as polymethylmethacrylate (PMMA) which requires dose in thousands of μC/cm2 [108]. Due to its lose dose requirement, the writing of patterns can be done in a fraction of seconds.…”

Section: Post Exposure Delay (Ped) -Enhancement Of Featurementioning

confidence: 99%

Low cost miniaturized spectrometer for mid infrared sensing

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Dose influence on the PMMA e-resist for the development of high-aspect ratio and reproducible sub-micrometric structures by electron beam lithography

Cited by 6 publications

References 25 publications

An Interdisciplinary Approach to the Nanomanipulation of SiO2 Nanoparticles: Design, Fabrication and Feasibility

An Interdisciplinary Approach to the Nanomanipulation of SiO2 Nanoparticles: Design, Fabrication and Feasibility

An Approach to the Extreme Miniaturization of Rotary Comb Drives

Low cost miniaturized spectrometer for mid infrared sensing

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