Doped Amorphous SiC, Mixed Carbide and Oxycarbide Thin Films by a Liquid Route

Chu, C.-J.; Liimatta, Eric; Mackenzie, John D.

doi:10.1557/proc-162-421

Cited by 6 publications

(6 citation statements)

References 4 publications

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“…Yajima studied the resistivity of polycarbosilane‐derived SiC as a function of pyrolysis temperature and also suggested a possible application to fabricate small‐size igniters. In the late 1980s Mackenzie's group at UCLA reported the electrical characterization of polycarbosilane‐derived SiC thin films, their semiconducting behavior and also demonstrated the possibility of B and P doping and the fabrication of P–N heterojunctions 368–370 . Surprisingly, the study of electrical properties of PDC was neglected for almost one decade, and was undertaken again in Germany only in 1999, with the work at Bosch 371 and in 2000 with the work of Greil's group 372 .…”

Section: Properties Of Pdcsmentioning

confidence: 99%

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

Colombo

Mera

Riedel

et al. 2010

Journal of the American Ceramic Society

1,525

582

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Preceramic polymers were proposed over 30 years ago as precursors for the fabrication of mainly Si-based advanced ceramics, generally denoted as polymer-derived ceramics (PDCs). The polymer to ceramic transformation process enabled significant technological breakthroughs in ceramic science and technology, such as the development of ceramic fibers, coatings, or ceramics stable at ultrahigh temperatures (up to 20001C) with respect to decomposition, crystallization, phase separation, and creep. In recent years, several important advances have been achieved such as the discovery of a variety of functional properties associated with PDCs. Moreover, novel insights into their structure at the nanoscale level have contributed to the fundamental understanding of the various useful and unique features of PDCs related to their high chemical durability or high creep resistance or semiconducting behavior. From the processing point of view, preceramic polymers have been used as reactive binders to produce technical ceramics, they have been manipulated to allow for the formation of ordered pores in the meso-range, they have been tested for joining advanced ceramic components, and have been processed into bulk or macroporous components. Consequently, possible fields of applications of PDCs have been extended significantly by the recent research and development activities. Several key engineering fields suitable for application of PDCs include high-temperature-resistant materials (energy materials, automotive, aerospace, etc.), hard materials, chemical engineering (catalyst support, food- and biotechnology, etc.), or functional materials in electrical engineering as well as in micro/ nanoelectronics. The science and technological development of PDCs are highly interdisciplinary, at the forefront of micro- and nanoscience and technology, with expertise provided by chemists, physicists, mineralogists, and materials scientists, and engineers. Moreover, several specialized industries have already commercialized components based on PDCs, and the production and availability of the precursors used has dramatically increased over the past few years. In this feature article, we highlight the following scientific issues related to advanced PDCs research: (1) General synthesis procedures to produce silicon-based preceramic polymers. (2) Special microstructural features of PDCs. (3) Unusual materials properties of PDCs, that are related to their unique nanosized microstructure that makes preceramic polymers of great and topical interest to researchers across a wide spectrum of disciplines. (4) Processing strategies to fabricate ceramic components from preceramic polymers. (5) Discussion and presentation of several examples of possible real-life applications that take advantage of the special characteristics of preceramic polymers. Note: In the past, a wide range of specialized international symposia have been devoted to PDCs, in particular organized by the American Ceramic Society, the European Materials Society, and the Materials Research S...

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Section: Properties Of Pdcsmentioning

confidence: 99%

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

Colombo

Mera

Riedel

et al. 2010

Journal of the American Ceramic Society

1,525

582

View full text Add to dashboard Cite

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“…However, despite the fact that this polymer and the products that are obtained from it have been the subject of widespread research (for example, see Refs. [6][7][8][9][10], only a few studies [11][12][13][14][15][16][17][18] have addressed thin-film deposition. In the thin-film deposition process, the PCS is dissolved in a suitable solvent, solution cast onto the substrate (via spinning, spraying, or dipping), and then pyrolyzed.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Silicon Carbide Thin Films with Polycarbosilane (PCS)

Colombo

Paulson

Pantano

1997

Journal of the American Ceramic Society

137

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Polycarbosilane (PCS) thin films were deposited on silicon (and other) substrates and heat treated under vacuum (∼10 −6 torr) at temperatures in the range of 200°-1200°C. At temperatures in the range of 1000°-1200°C, the initially amorphous PCS films transformed to polycrystalline ␤-silicon carbide (␤-SiC). Although PCS films could be deposited at thickness up to 2 µm, the films with thicknesses >1 µm could not be transformed to SiC without extensive cracking. The resulting SiC coatings were characterized using Fourier transform infrared spectroscopy, glancingangle X-ray diffractometry, secondary-ion mass spectroscopy, Raman spectoscopy, transmission electron microscopy, and scanning electron microscopy. The temperature and time dependence of the amorphous-to-crystalline transition could be associated with the evolution of free carbon, oxygen, and hydrogen in the films.

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“…This dimension suited for MEMS and optoelectronic devices applications. [10][11][12][13][14][15][16]25,32 The resistance was directly measured at room temperature by means of an (HP16047A) test fixture. The results were shown in Table 1 for the continuous freestanding SiC films with oxidation and irradiation.…”

Section: Physical Propertiesmentioning

confidence: 99%

“…This method is of great advantages in simple process, low cost and good performance. 9 Chu et al 10,11 first studied preparation and characterization of amorphous SiC film by a liquid route. In the SiC thin-film deposition process, the PCS was dissolved in a suitable solvent, cast onto the substrate, and then pyrolyzed.…”

Section: Introductionmentioning

confidence: 99%