La 12x Ca x VO 3 composition-spread film library was fabricated by combinatorial pulsed laser deposition and their thermoelectric properties were evaluated paralelly by the multi-channel probes of Seebeck coefficient and electric conductivity. Concurrent X-ray analysis verified the formation of solid soluted films in the full composition range ð0 % x % 1Þ as judged from the linear variation of the lattice constants. The Seebeck coefficients of La 12x Ca x VO 3 changed from a large negative value to almost zero with the increase of x; due presumably to the variation of valence in vanadium ions.The power factor in this library was as high as 0.6 mW/cm K 2 , which was obtained at x ¼ 0, i.e. pure LaVO 3 grown at 800 8C. q