DLC film preparation by LASER-ARC and properties study

Scheibe, H.‐J.; Siemroth, P.; ̈neich, B. Scho; Mucha, A.; Kluge, G.

doi:10.1016/0925-9635(92)90007-b

Cited by 26 publications

(3 citation statements)

References 13 publications

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“…In the case of magnetic filtering (Figure 6a,c), no significant changes in optical constants were seen. This was unexpected based on the literature, where a strong influence of the substrate temperature on the refractive index and the extinction coefficient was described [16]. However, the refractive index of about 2.6 is much higher than reported in the literature for magnetron sputtering [14] and Laser Arc [16], indicating the presence of diamond bonds to a large extent.…”

Section: Optical Propertiesmentioning

confidence: 85%

“…Established PVD methods are conventional magnetron sputtering [14], Pulsed Laser Deposition [15], and Arc Evaporation. The latter can work with DC current or in a pulsed mode, such as a Laser Arc [16] or High Current Arc (HCA) [17]. The HCA technique uses plasma pulses up to 3000 A and can produce carbon coatings with very high hardness and density because of the higher content of sp 3 -hybridized carbon bonding, compared to other methods described above.…”

Section: Introductionmentioning

confidence: 99%

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The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

et al. 2019

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Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 °C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp3 content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings.

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Section: Optical Propertiesmentioning

confidence: 85%

Section: Introductionmentioning

confidence: 99%

The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

et al. 2019

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“…Multi-technique investigation of these layers can result in enhancing their quality. The commonly used methods for producing DLC layers are PVD [1], plasma CVD [2][3][4] ion beam deposition [5,6], sputtering [7] and pulsed laser deposition (PLD) [8][9][10][11][12][13][14]. Many of the PLD studies concentrate on excimer laser deposition techniques.…”

Section: Introductionmentioning

confidence: 99%

Properties of High-Density Amorphous Carbon Films Deposited by Laser Ablation

Kovách

Csorbai

Radnóczi

et al. 2003

MSF

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The properties of carbon films deposited by high intensity pulsed Nd:Glass laser are reported. Different measurements like TEM, SIMS, EELS, XPS and AFM showed the formation of a high-density amorphous carbon layer with good protection against chemically aggressive alkaline solutions. We demonstrated that instead of excimer lasers, Nd-based solid state lasers can be used successfully for preparation of high quality amorphous carbon films.

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Elastic Modulus of Amorphous Carbon Films

Schultrich

Scheibe

Grandremy

et al. 1994

Phys. Stat. Sol. (a)

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The elastic moduli directly reflect bonding strength and structure. Usually these factors can be only slightly modified within a given material, but in amorphous carbon films large variations of Young's modulus from less than 100 up to more than 500 GPa are found. This can be attributed mainly to the varying fraction of sp3 and sp2 bonds. Even for hard amorphous carbon films of diamond‐like nature the modulus achieves only 30 to 50% of crystalline diamond. The Young's modulus is measured by a specially developed method. It is based on the determination of the frequency dependent propagation velocity of ultrasonic surface waves and its mathematical evaluation. The potential of this nondestructive method is demonstrated for amorphous carbon films down to a thickness of 100 nm. It turns out to be a suitable means for characterizing and classifying such films.

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DLC film preparation by LASER-ARC and properties study

Cited by 26 publications

References 13 publications

The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

Properties of High-Density Amorphous Carbon Films Deposited by Laser Ablation

Elastic Modulus of Amorphous Carbon Films

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