Distance measurement with extended range using lateral shearing interferometry and Fourier transform fringe analysis

Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution

“…To achieve precision scanning, the platform always equips with high precision position or displacement sensor, such as capacitance sensor or laser interferometer. Because laser interferometer offers a wide measuring range 3 and theoretically unlimited resolution, it has already been an important measurement tool, and comprehensively used for precision measurements of displacement or other quantities which can be converted into displacement. However, the laser interferometer always suffers from a lot of errors or noises in air, which most likely resulting from atmospheric influences, background vibration, thermal drift, and electronic high frequency noises 4 .…”

Wave-front displacement system for Vectorial shearing interferometer

“…2 The shearing interferometer can be implemented with one of the next configurations: Michelson, 3 Jamin with double displacement, 4 and cyclic interferometer. 5 In order to displace the wave front it is possible to use a liquid crystal as phase retarder 6 or a calcite plate.…”

Phase-shifting lateral shearing interferometry using wedge-plate and interferometric grating

“…A review article by Shukla and Malacara presented in detail several applications of the interferometer in testing systems and components [1]. In recent years, the technique has been applied to the measurement of vibration [2], temperature [3], distance [4], etc. The use of an interferometer for detecting optical vortices [5], testing collimation [6], and measuring the focus shifting caused by laser systems [7] has also been reported.…”