Dissolvable Template Nanoimprint Lithography: A Facile and Versatile Nanoscale Replication Technique

Abstract

Nanoimprinting lithography (NIL) is a nextgeneration nanofabrication method, capable of replicating nanostructures from original master surfaces. Here, we develop highly scalable, simple, and nondestructive NIL using a dissolvable template. Termed dissolvable template nanoimprinting lithography (DT-NIL), our method utilizes an economic thermoplastic resin to fabricate nanoimprinting templates, which can be easily dissolved in simple organic solvents. We used the DT-NIL method to replicate cicada wings which have surface nanofeatures of ∼100 nm in height. The master, template, and replica surfaces showed a >∼94% similarity based on the measured diameter and height of the nanofeatures. The versatility of DT-NIL was also demonstrated with the replication of re-entrant, multiscale, and hierarchical features on fly wings, as well as hard silicon wafer-based artificial nanostructures. The DT-NIL method can be performed under ambient conditions with inexpensive materials and equipment. Our work opens the door to opportunities for economical and highthroughput nanofabrication processes.

Staying Dry and Clean: An Insect’s Guide to Hydrophobicity

“…A bioinspired templating technique has been developed to fabricate multifunctional optical coatings based on the superhydrophobic self-cleaning nanopillars of cicada wings and the anti-reflective compound eyes of moths [ 68 ]. Another novel templating technique, dissolvable template nanoimprint lithography (DT-NIL), was created to replicate the nanopillar structure of cicada wings [ 83 ]. Other soft lithography techniques have allowed us to create materials inspired by the superhydrophobic and anti-fogging properties of mosquito compound eyes and superhydrophilic surfaces, inspired by the anti-reflective and anti-fogging properties of insects, have been created using silica materials [ 68 ].…”

Organic ultrathin nanostructure arrays: materials, methods and applications

“…94,108,109 Recently, Oh et al developed scalable, simple, and inexpensive dissolvable template nanoimprinting lithography (DT-NIL). 110 They replicated cicada wings which have surface nanofeatures of $100 nm in height by using the DT-NIL method, which demonstrates that the method can achieve scalable replication of a range of natural and engineered surfaces with complex surface topographies. In addition to the rigid mold, an elastomeric stamp with nanoscale patterns can be used as the so mold of the NIL.…”

Surface Modification, Topographic Design and Applications of Superhydrophobic Systems

“…Moreover, template‐based methods are very suitable to prepare regular surface morphology. Oh et al [107] . developed highly scalable, simple, and nondestructive NIL using a dissolvable thermoplastic resin as the template with surface nanofeatures of ∼100 nm in height, replicating from cicada wings.…”