The determination of niobium, molybdenum, tungsten, iron and titanium in tantalum metal is described. After dissolution of the metal a d extraction of the tantalum by a chromatographic method using tributyl phosphate, the trace elements are determined on thin-film samples by x-ray fluorescence spectrometry. The thin-film samples are prepared either by spotting the sample solutions directly on to filter-paper or by coprecipitation with indium. The limits of detection on the thin film are 0.05-0.7 pg, depending on the element being measured.