Advances in Resist Technology and Processing XI 1994
DOI: 10.1117/12.175384
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Dissolution inhibition of phenolic polymers: does a simple percolation field scaling law suffice?

Abstract: The universality of a single percolation field scaling law to the tetramethylammonium hydroxide dissolution of derivatized novolac and poly(4-vinylphenol) polymers was investigated. According to this hypothesis, the dissolution ofphenolic polymers occurs through a percolative mechanism resulting from the diffusion of base along nascent channels formed by the spatial proximity of phenolic hydroxyl groups (presumably diffusion of the cation is rate limiting). Dissolution inhibition results from the the removal o… Show more

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