Dissociation of tetramethylsilane for the growth of SiC nanocrystals by atmospheric pressure microplasma

Abstract

We report on mass spectrometry of residual gases after dissociation of tetramethylsilane (TMS) during the synthesis of silicon carbide (SiC) nanocrystals (NCs) by an atmospheric pressure microplasma. We use these results to provide details that can contribute to the understanding of the formation mechanisms of NCs.K E Y W O R D S atmospheric pressure plasma, mass spectrometry, nanocrystals, silicon carbide, tetramethylsilane

Modeling of Atmospheric-Pressure Dielectric Barrier Discharges in Argon with Small Admixtures of Tetramethylsilane

“…Further modeling results show that, for instance, TMS reduces by 90% at initially x = 50 ppm , while 50% of the monomer remain after t r = 8 ms at x = 200 ppm . This finding agrees well with the analysis provided by [30], where the consumption of TMS in an atmospheric-pressure Ar-TMS microplasma was found to be more effective at low TMS concentrations compared with their consumptions at high concentrations. A similar trend of monomer depletion in a large-area atmosphericpressure DBD in Ar-HMDSO mixtures was recently discussed in [37].…”

“…The latter originates from collision processes of 1,1,3,3-tetramethyl-1,3-disilacyclobutane (Table 3) mainly with excited argon atoms leading to Penning ionization. Notice that several of the positive ions were also reported in the studies of an atmospheric-pressure microplasma with Ar-TMS containing 280, 1600, and 3500 ppm , respectively, of TMS [30]. These are the ions with the nominal mass M/ Z 15, 26, 28, 45, 58, 59, 73, and 129 (cf.…”

“…% TMS was used in [25][26][27][28][29] to improve the surface hydrophobicity of imitation leather with polyester surface. Furthermore, Haq et al [30] recently used an atmospheric-pressure microplasma reactor fed by an Ar-TMS mixture containing up to 3500 ppm TMS to study its dissociation for the growth of SiC nanocrystals.…”

Surfactant-free synthesis of copper nanoparticles and gas phase integration in CNT-composite materials

“…2b), which broadly follows a log-normal trend with a geometric mean diameter of 7.94 nm and a geometric standard deviation of 1.92. Nevertheless, particles as large as 30 nm in diameter were also found, which can be in part attributed to coalescence of smaller particles in flight during synthesis; [39][40][41][42] this is corroborated by a slightly bimodal distribution with a peak developing above ~16 nm diameter. NPs are well dispersed and nonagglomerated.…”

Special issue: Plasma synthesis of nanoparticles and nanocomposite coatings

“…The manuscripts from Dasgupta et al, Uner et al, and Haq et al focus on the synthesis and processing of free‐standing nanoparticles. Haq et al [ 12 ] describe the synthesis of silicon carbide nanocrystals in an atmospheric pressure microplasma, confirming the capability of these reactors to process refractory materials like nitrides and carbides despite operating at relatively low‐temperature and using short reaction times. [ 13 ] Dasgupta et al [ 14 ] describe a process for the synthesis and inline coating of silicon particles with an oxide shell.…”