Displacement measurement using an optoelectronic oscillator with an intra-loop Michelson interferometer

Lee, Je-Hyun; Park, Soo‐Young; Seo, Dae Han; Yim, Sin Hyuk; Yoon, Soon‐Chang; Cho, D.

doi:10.1364/oe.24.021910

Cited by 15 publications

(7 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…An autocollimator is customarily used for measurement of straightness, flatness and angular position [11]. As mentioned, the principles of interferometry and internal-reflection have been transformed into the displacement measurement field [12][13][14][15]. However, seldom has the autocollimator principle been studied in the field of displacement measurement.…”

Section: Introductionmentioning

confidence: 99%

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

et al. 2019

Applied Sciences

View full text Add to dashboard Cite

The micro-displacement measurement system with 2D/3D has become increasingly important in the field of scientific research and technology application. In order to explore the application of an optical surface in micro-displacement measurement, a novel and simple 2D micro-displacement measurement method based on the elliptical paraboloid was designed and subjected to experiment. The measurement system takes advantage of the elliptical paraboloid instead of a plane mirror in the optical structure of an autocollimator which has been ameliorated to adapt to curved surface measurement. Through the displacement of the light spot on the CCD (Charge Coupled Device) detector, the displacement of the target could be measured with a linear correlation coefficient of 0.9999. The accuracy of the system is about ± 0.3 µm in a wide range in two dimensions. The results were in good agreement with the theoretical analysis and indicated the potential applicability of the proposed system in the detection of geometric errors of CNC (Computerized Numerical Control) machine tools.

show abstract

Section: Introductionmentioning

confidence: 99%

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

et al. 2019

Applied Sciences

View full text Add to dashboard Cite

show abstract

“…The measurement accuracy of the inductance measurement method can be up to ±0.1 mm, but it has a poor dynamic response and the structure is more sophisticated [21]. Laser interferometry has been widely used in the field of precision displacement measurement [22,23]. It has the advantages of high measurement precision and large range.…”

Section: Introductionmentioning

confidence: 99%

Displacement Measurement Method Based on the Rotating Paraboloid Array

Zhang

et al. 2019

Applied Sciences

View full text Add to dashboard Cite

Using an optical freeform surface to realize the precision measurement of displacement has become a research focus in the present day. However, the measurement range of this method is limited by the size of the freeform surface processed. In order to overcome this difficulty, this paper presents a two-dimensional displacement measurement system with a large range, which is composed of a slope sensor and a rotating paraboloid array. The slope sensor utilizes the optical structure of an autocollimator with minor optimization, and the rotating paraboloid array expands the measurement range of the system in a discrete manner. The experimental results showed that the optimized optical system enhanced the measurement accuracy to ±0.4 μm within the range of 1500 μm and the overall measurement error was approximately ±2 μm when measured within the range of 450 mm. The developed measurement system has potential applicability for detection of errors, such as the position error and straightness error of multi-axis systems.

show abstract

“…There are several types of optical fiber sensors based on the microwave photonic (MWP) technology. One method uses the opto-electric oscillator (OEO) to sense the displacement and other parameters [ 17 ]. The displacement of the object to be tested produces a shift of the oscillator frequency of the output microwave signal from the OEO.…”

Section: Introductionmentioning

confidence: 99%

Optical Fiber Displacement Sensor Based on Microwave Photonics Interferometry

Dong

Liu

Yang

et al. 2018

Sensors

View full text Add to dashboard Cite

An optical fiber displacement sensor based on the microwave photonics interferometric (MWPI) method is proposed and experimented, which provides an ideal solution for large range displacement measurement with high resolution. The sensor used a Michelson microwave photonics interferometer to sense the displacement with one sensing arm and a length-adjusted reference arm. The displacement variation would change the period of the microwave response function of the interferometer. According to the principle that the phase difference in one free spectral range (FSR) of the microwave response function is 360°, the displacement can be retrieved by the microwave response function by means of a vector network analyzer (VNA). A programmable path-switching true time delay line was used in the reference arm to decrease the microwave bandwidth. The measurement results show that the displacement sensing range is larger than 3 m and the measurement resolution is 31 μm. Finally, the measurement stability is tested, and the factors affecting the measurement resolution of this method and the main source of errors are investigated in detail.

show abstract

Displacement measurement using an optoelectronic oscillator with an intra-loop Michelson interferometer

Cited by 15 publications

References 15 publications

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

A Novel 2D Micro-Displacement Measurement Method Based on the Elliptical Paraboloid

Displacement Measurement Method Based on the Rotating Paraboloid Array

Optical Fiber Displacement Sensor Based on Microwave Photonics Interferometry

Contact Info

Product

Resources

About