Displacement measurement by SAW delay-line oscillator consisting of two LiNbO₃ plates with IDT

Uncertainty in multiple penetration depth fringing electric field sensor measurements

“…The general uncertainty equation is (1) where is the variable with the uncertainty that varies depending on the independent variables (2) is the uncertainty in the variable , and the variables represent the independent uncertainties in the variables [12]. Uncertainties are typically measured in a region of 95% confidence.…”

“…Most commonly, interdigital electrodes are encountered in surface acoustic wave (SAW) devices [1], but they are also used for fringing electric field measurements, capacitive measurements, in MEMS, and in chemical and biological applications [2]. The focus of this work is on multiple penetration depth fringing electric field measurements with a three-wavelength interdigital sensor.…”