2001
DOI: 10.1063/1.1425451
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Dislocation-free and lattice-matched Si/GaP1−xNx/Si structure for photo-electronic integrated systems

Abstract: We proposed a Si/III–V–N compound semiconductors/Si structure, which is applicable to optoelectronic integrated circuits (OEICs). The feature of this structure is that optoelectronic devices and Si electronic devices could be fabricated by low-temperature planar process at the same time. A dislocation-free and lattice-matched Si/GaP1−xNx/Si (x=2.9%) structure, which is a basic structure for OEICs, was grown by molecular-beam epitaxy. The images of transmission electron microscopy revealed that there were no th… Show more

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Cited by 73 publications
(51 citation statements)
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“…Moreover, relatively strong photoluminescence (PL) and electroluminescence have been observed [2,3]. We have realized a dislocation-free GaPN layer, which was lattice-matched to Si, grown on Si substrates with a thin GaP buffer layer [4,5]. Additionally, the PL was observed at room temperature (RT).…”
mentioning
confidence: 93%
“…Moreover, relatively strong photoluminescence (PL) and electroluminescence have been observed [2,3]. We have realized a dislocation-free GaPN layer, which was lattice-matched to Si, grown on Si substrates with a thin GaP buffer layer [4,5]. Additionally, the PL was observed at room temperature (RT).…”
mentioning
confidence: 93%
“…Lattice-matched layers and slightly tilted substrates are used to overcome two of the main difficulties faced by the growth of III-V materials on silicon substrates: misfit dislocations and anti-phase lattice defects, in order to obtain defect-free III-V materials and to get large minority carrier diffusion lengths for the PV applications (Furukawa et al 2002;Momose et al 2001;Volz et al 2011;Létoublon et al 2011;Grassman et al 2009). The tandem GaAsPN/Si double-junction solar cell will be electrically connected with a tunnel junction (TJ), either Sibased or III-V based or hybrid (III-V/Si), depending on both the modeling results and the structural properties of the III-V compound.…”
Section: Monolithic Growth Of Diluted-nitride Iii-v-n Compounds On Simentioning
confidence: 99%
“…For example, GaNP can be grown lattice matched to Si, opening new possibilities to combine high optical efficiency of the III-V compound semiconductors with the mainstream microelectronics based on silicon, yielding, e.g., novel optoelectronic integrated circuits based on GaNP/Si. 8,9 GaInNP alloys lattice matched to GaAs are expected to greatly improve the performance of GaInNP/GaAs HBTs. 10 For full exploration of the dilute nitrides in device applications, a better understanding and control of defects located at interfaces involving Ga͑In͒NP are required.…”
Section: Introductionmentioning
confidence: 99%