Discharges due to separation of a corona-charged insulating sheet from a grounded metal cylinder

Multifractal Image Analysis of Electrostatic Surface Microdischarges

“…1. Similar pictures are also available in the detailed study of separation discharges published by Takahashi, Fuji, Wakabayashi, Hirano and Kobayashi [8].…”

“…where h is a model parameter. In the sequence of simplifying simulation steps the dimension D of the resulting structure is dependent on the only model parameter h, i.e, D(h), although there is experimental evidence [3], [8] that branching depends on more than one parameter: the thickness ratio between the discharge gap and the dielectric layer, electronegativity of the used gas and the chosen external (global) voltage, to mention some of them. The dependence on external voltage for the case of our surface electrostatic separation discharges actually means dependence on the remanent electret surface charge density.…”

“…In such cases charge carriers are forced to propagate along a highly resistive dielectric surface where they are trapped and create latent invisible tracks which can be visualized by means of the well-known powder technique. The visible powder tracks called Lichtenberg figures [1] have been used many times [2][3][4][5][6][7][8][9][10][11] to study gaseous discharges on the surface of dielectrics.…”

In-situ detection method for wafer movement and micro-arc discharge around a wafer in plasma etching process using electrostatic chuck wafer stage with built-in acoustic emission sensor

“…Because opposite charges accumulate on the back surface of the wafer and the ESC surface while the wafer is chucked, the wafer movement in this case would induce the discharge, similarly to discharge caused by separation. 37) Figure 13 shows the time-frequency analysis for the acoustic waves shown in Fig. 11.…”

Fractality of Electrostatic Microdischarges on the Surface of Polymers

“…Such branched patterns can be visualised by using photographic or powder techniques. These visible tracks are called Lichtenberg figures and have often been used to study gaseous discharges on the surface of dielectrics [1][2][3][4][5][6].…”