“…At the present time, very few laser sources are available in the VUV (Table 1). Among them the ArF excimer laser with limited tunability at 193 nm [40,41], and the molecular fluorine laser at 157 nm [42][43][44][45][46][47][48][49][50], are the only efficient laser sources available on the laboratory scale. Laser transitions at 156.71, 157.48, and 157.59 nm have been observed for the first time by Woodworm and Rice [42,43] in F 2 /He mixtures excited with an electron gun with high efficiency and in electric discharge-pumped lasers.…”