2019
DOI: 10.3390/coatings9090538
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Directly Writing Patterning of Conductive Material by High Voltage Induced Weak Electric Arc Machining (HV-μEAM)

Abstract: An additive manufacturing (AM) method for the deposition of metallic layer in micron scale on monocrystalline silicon wafer surface by high voltage induced weak electric arc machining (HV-μEAM) has been proposed. The process characteristics of HV-μEAM are analyzed to fulfil the metal material deposition. The influence of the processing parameters on the deposition effect were studied with copper as additive electrode material. Using the optimal parameters, a number of complex trajectory deposition experiments … Show more

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Cited by 7 publications
(6 citation statements)
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References 43 publications
(42 reference statements)
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“…The XRD results shown in Figure 7c indicate that the Fe3Al phase was formed in the Fe-Al MNS. Because of the high temperature and pressure during the electrical discharge process of the Fe-Al electrode [27,28], the gap between the Fe-Al electrode and working piece acted like a sintering furnace, which promoted the formation of the Fe3Al phase in the coating. In addition, the intensity of characteristic peaks for the AlFe3C0.5 phase, showing in Figure 7c, decrease with the increasing gap voltage, indicating that the content of AlFe3C0.5 phase in Fe-Al MNS decreases.…”
Section: Surface Morphology and Chemical Compositionmentioning
confidence: 99%
“…The XRD results shown in Figure 7c indicate that the Fe3Al phase was formed in the Fe-Al MNS. Because of the high temperature and pressure during the electrical discharge process of the Fe-Al electrode [27,28], the gap between the Fe-Al electrode and working piece acted like a sintering furnace, which promoted the formation of the Fe3Al phase in the coating. In addition, the intensity of characteristic peaks for the AlFe3C0.5 phase, showing in Figure 7c, decrease with the increasing gap voltage, indicating that the content of AlFe3C0.5 phase in Fe-Al MNS decreases.…”
Section: Surface Morphology and Chemical Compositionmentioning
confidence: 99%
“…From Equation (1), it can be found that the current density depends on electric field intensity, the higher the electric field intensity, the higher the current density. Considering the geometrical shape of the micro-peaks, the enhanced electric field at the micro-peaks on the electrode surface can be expressed as follows [19]: E p = U r t 0.75 l g 0.25 (2) where r t is the tip radius of micro-peaks (m), U is the voltage between electrodes, l g is the discharge gap (m).…”
Section: Formation and Expansion Of Discharge Plasmas Of Micro-edmmentioning
confidence: 99%
“…In recent years, more and more attention has been paid to precision machining technology and methods [1,2]. As one of the most popular microfabrication methods, micro-electrical discharge machining (micro-EDM) has been widely applied to fabricate various difficult-to-cut materials [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
“…With the increasing market demand for miniaturization and the precision of products, micro-processing technology has become one of the important indicators to measure a country's scientific and technological strength [1][2][3]. Micro-electrical discharge machining (micro-EDM) has become one of the most popular microfabrication technologies due to the advantage of machining electrically conductive materials without direct contact [4][5][6]. Micro-EDM has been has attracted great attention from researchers and has been widely used in the micro-machining field [7][8][9].…”
Section: Introductionmentioning
confidence: 99%