Abstract:Physical foundations of directional auger electron spectroscopy (DAES) and calculation of DAES profiles in single scattering cluster approach are presented. Limitations of this method (application only to investigation of the crystalline structure of homogeneous samples) is shown and explained as the result of participation of inelastically scattered electrons in the Auger signal generation. To extend the DAES application for the interface structure, the use of as low as possible energy of primary electrons is… Show more
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