Direct writing immersion laser lithography on graphene monolayers using two-photon absorption
Jianran Zhang,
Carsten Strobel,
Kathrin Estel
et al.
Abstract:Direct writing laser lithography has become increasingly attractive due to its mask-free nature, offering significant design flexibility and minimizing additional costs associated with new exposure masks. Among the various direct laser writing techniques, two-photon absorption direct laser writing stands out for its ability to fabricate very small features through nonlinear optical effects. Operating this technique in immersion, where the air gap between the lens and photoresist or probe is liquid-filled, has … Show more
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