Direct‐Write Thermocapillary Dewetting of Polymer Thin Films by a Laser‐Induced Thermal Gradient

Singer, Jonathan P.; Lin, Pao Tai; Kooi, Steven E.; Kimerling, Lionel C.; Michel, Jürgen; Thomas, Edwin L.

doi:10.1002/adma.201302777

Cited by 50 publications

(59 citation statements)

References 23 publications

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“…Though employed by the semiconductor community for many years, laser spike annealing (LSA) has only recently been translated into soft matter systems by Jung et al We have extended this concept to a high resolution laser direct write process, called focused laser spike (or FLaSk, illustrated in Fig. ) annealing . In this way, the LSA also incorporates sub‐micron spatial control and allows for extreme gradients exceeding 1000 K μm −1 , 2 orders of magnitude greater than previously employed .…”

Section: Introductionmentioning

confidence: 99%

“…These massive temporal and spatial thermal gradients and resulting thermal Marangoni stresses in polymer thin films generated by FLaSk annealing are much greater than the driving forces associated with conventional dewetting and can therefore be used as an effective means for the rapid directed manipulation of soft matter. We have employed FLaSk as a way to induce dewetting of homopolymer films and, at sub‐dewetting doses, the ordering and alignment of the block copolymer (BCP) domains in single‐microdomain thick films . This method has since been used by others to study, for example, the Marangoni‐stress‐induced rupture of liquid films and patterning of molten amorphous silicon .…”

Section: Introductionmentioning

confidence: 99%

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Focused laser‐induced marangoni dewetting for patterning polymer thin films

Singer

Kooi

Thomas³

2015

J Polym Sci B Polym Phys

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Highly‐localized focused laser spike (FLaSk) heating of polymer thin films is a resist‐ and developer‐free alternative to two‐dimensional (2D) laser direct write for creating patterns on the single micron or, by exploiting overlap effects, submicron scale. The massive temporal and spatial thermal gradients and resulting thermal Marangoni stresses generated by FLaSk are an effective means for the directed dewetting and patterning of such films. Here, the general applicability of this technique to glassy amorphous polymer thin film systems is investigated through systematic investigation of film thickness, glass transition temperature, and polymer mobility. The results reveal that the important parameters are the film thickness (coupled to the optical heating effects through anti‐reflection coating effects) and the high‐temperature polymer melt mobility, allowing for generation of single features with linewidths of down to ∼1 μm. Further, the introduction of spatial mobility variations by using polymer brushes, bilayers, and microphase separated block copolymers leads to additional profile manipulation effects (i.e. spontaneous 2D pattern generation and flattened top profiles). © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2016, 54, 225–236

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Focused laser‐induced marangoni dewetting for patterning polymer thin films

Singer

Kooi

Thomas³

2015

J Polym Sci B Polym Phys

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“…Recently, Singer et al used a laser-based technique to induce localized dewetting of thin polymer films. 15 In this article, we present quantitative experiments and numerical simulations of the deformation and rupture of non-volatile liquid films by non-uniform temperature distributions, induced by infrared (IR) laser heating of the substrate. We studied the dependence of the rupture time of partially wetting thin films on the two most important experimental parameters, i.e., the laser power and the laser spot size.…”

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confidence: 99%

Infrared laser induced rupture of thin liquid films on stationary substrates

Wedershoven¹,

Berendsen²,

Zeegers³

et al. 2014

Applied Physics Letters

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We studied the deformation and destabilization of thin liquid films on stationary substrates via infrared illumination. The film thickness evolution was measured using interference microscopy. We developed numerical models for the temperature evolution and the liquid redistribution. The substrate wettability is explicitly accounted for via a phenomenological expression for the disjoining pressure. We systematically measured the film thinning- and rupture dynamics as a function of laser power, which are accurately reproduced by the simulations. While smaller laser spots generally lead to shorter rupture times, the latter can become independent of the spotsize for very narrow beams due to capillary suppression.

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“…Interference lithography was combined with 3D scanning of the laser annealing focal volume, allowing the fabrication of hierarchical patterns in chemically amplified photoresists . It was also demonstrated how a scanning laser spot could be used to controllably induce thermocapillary (Marangoni) dewetting of polymer thin films, thereby patterning them . Singer et al applied FLaSk to annealing of block copolymer thin films, by combining laser illumination to induce local heating with solvent vapor swelling of the BCP film ( Figure ) .…”

Section: Discussionmentioning

confidence: 99%

Photothermally Directed Assembly of Block Copolymers

Nowak

Yager

2019

Adv Materials Inter

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Block copolymers self‐assemble into nanoscale morphologies, spontaneously ordering under thermal annealing conditions owing to the chemical incompatibility between the blocks. While the morphologies that form can be rationalized based on equilibrium arguments, the structures seen experimentally are strongly influenced by kinetic effects including process history. Recently, a variety of photothermal processing techniques have been used to control block copolymer ordering. Photothermal methods provide access to extreme conditions, including high temperatures, large heating rates, and sharp thermal gradients. This can correspondingly be used to greatly accelerate block copolymer ordering kinetics, to pattern material order, or to probe fundamental aspects of self‐assembly by exploring process histories.

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Direct‐Write Thermocapillary Dewetting of Polymer Thin Films by a Laser‐Induced Thermal Gradient

Cited by 50 publications

References 23 publications

Focused laser‐induced marangoni dewetting for patterning polymer thin films

Focused laser‐induced marangoni dewetting for patterning polymer thin films

Infrared laser induced rupture of thin liquid films on stationary substrates

Photothermally Directed Assembly of Block Copolymers

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