Direct write patterning of ito film by femtosecond laser ablation

Choi, Hae Woon; Farson, Dave F.; Kim, Kwang-Ryul; Hong, Soon-Kug

doi:10.2351/1.5060529

Cited by 5 publications

(3 citation statements)

References 5 publications

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“…This procedure is based on an assumption that the groove width and the ablation diameter of a single spot are equal. It has been shown in other thin film ablation work by the authors 22 that the width of lines ablated in thin film with femtosecond pulsed lasers still followed the expected logarithmic trend. As shown in Fig.…”

Section: Resultssupporting

confidence: 51%

Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation

Choi

Johnson

Nam

et al. 2007

Journal of Laser Applications

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Meshes of electrospun ͑ES͒ polycaprolactone ͑PCL͒ and polyethylene terephthalate nanofiber meshes were structured by ablation of linear grooves with a scanned femtosecond laser. Focus spot size, pulse energy, and scanning speed were varied to determine their affects on groove size and the characteristics of the electrospun fiber at the edges of these grooves. The femtosecond laser was seen to be an effective means for flexibly structuring the surface of ES PCL scaffolds. Femtosecond ablation resulted in much more uniformly ablated patterns compared to Q-switched nanosecond pulse laser ablation. Also, the width of the ablated grooves was well controlled by laser energy and focus spot size, although the grooves were significantly larger than the spot size. Also, some melting of fibers was observed at the edges of grooves. These affects were attributed to optical radiation from laser-induced plasma at higher pulse energies and melting of fibers at laser fluences lower than the ablation threshold. The ablation threshold for the PCL mesh was estimated to be significantly larger than that of bulk ͑solid͒ PCL, a result attributed to multiple scattering of the laser energy within the volume of the nanofiber mesh.

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Section: Resultssupporting

confidence: 51%

Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation

Choi

Johnson

Nam

et al. 2007

Journal of Laser Applications

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“…Photolithograny has, however, problems in need of solution such as low productivity and waste chemicals that damage the environment. Therefore, laser processing has been attracting attention as an alternative technique [2,3,5,6]. Most of the previous works consider the processing of Indium Tin Oxide (ITO) thin films because ITO is currently used to make transparent electrode for FPDs.…”

Section: Introductionmentioning

confidence: 99%

49.3: Mechanism and Advanced Application of Rapid Laser Processing on SnO₂ Thin Films for FPD Manufacture

Usui

Mihara

Morinaga

et al. 2008

Symp Digest of Tech Papers

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A Nd:YAG laser processing on a SnO2‐system thin films for FPD manufacturing is investigated as an alternative to photolithographic etching on ITO. Because of the difficulty in realizing a low energy process on SnO2 due to a high melting point, we experimentally found the proper deposition condition and composition of SnO2‐system thin films. By considering two physical mechanisms, namely, plasmon oscillation and inverse bremsstrahlung process, we achieved satisfactory laser processing using only 2 J/cm2 of laser energy. This result leads to the possibility of high‐speed electrode patterning suitable for FPD mass production.

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“…Furthermore, used chemicals are hazardous to the environment. A direct laser process has been studied to solve these issues, and actually attracted an attention as a next generation pattern process on thin films [1,2,4]. Previous research targeted ITO thin films to process by laser.…”

Section: Introductionmentioning

confidence: 99%

60.3: Advanced Application of Direct Laser Process on SnO₂ Thin Films for FPDs

Usui

Mihara

Satoh

et al. 2007

Symp Digest of Tech Papers

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A Nd:YAG laser process on pure and doped SnO 2 thin films was investigated as a key technology for a next generation flat panel displays manufacture replacing photolithography etching process on Indium-Tin-Oxide that is currently in use. It is found that the laser process is capable of making fine micro patterns on SnO 2 thin films that have high carrier concentration by as low laser energy as 6J/cm 2 .

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Direct write patterning of ito film by femtosecond laser ablation

Cited by 5 publications

References 5 publications

Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation

Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation

49.3: Mechanism and Advanced Application of Rapid Laser Processing on SnO₂ Thin Films for FPD Manufacture

60.3: Advanced Application of Direct Laser Process on SnO₂ Thin Films for FPDs

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Direct write patterning of ito film by femtosecond laser ablation

Cited by 5 publications

References 5 publications

Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation

Structuring electrospun polycaprolactone nanofiber tissue scaffolds by femtosecond laser ablation

49.3: Mechanism and Advanced Application of Rapid Laser Processing on SnO2 Thin Films for FPD Manufacture

60.3: Advanced Application of Direct Laser Process on SnO2 Thin Films for FPDs

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Product

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49.3: Mechanism and Advanced Application of Rapid Laser Processing on SnO₂ Thin Films for FPD Manufacture

60.3: Advanced Application of Direct Laser Process on SnO₂ Thin Films for FPDs