Direct-write of tungsten-carbide nanoSQUIDs based on focused ion beam induced deposition

Sigloch, Fabian; Sangiao, Soraya; Orús, Pablo; Teresa, José María de

doi:10.1039/d2na00602b

Cited by 4 publications

(3 citation statements)

References 49 publications

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“…(3) JJs and SQUIDs for on-tip sensors. FIB-based milling [57], irradiation [63] and deposition [93] seem convenient to create superconducting sensors on tips and cantilevers, in particular JJs and SQUIDs, with the potential to investigate relevant physical properties of materials and devices at the nanoscale [58]. These specialized sensors could represent a niche for FIB-based processing given that the use of standard lithography might be possible here, but difficult for up-scaling [110,111].…”

Section: Discussionmentioning

confidence: 99%

“…Also, arrays of Nb-C JJs have been deposited by FIBID [92]. In addition, nanoSQUIDs based on W-C deposits grown by FIBID have been fabricated with Dayem-bridge-type geometry [93]. Such nanoSQUIDs are expected to be directly grown on cantilevers for scanning-on-tip devices, which would allow sensing small magnetic fields, currents and dissipation with high lateral resolution, as mentioned in the previous section [57].…”

Section: Direct Growth Of Superconducting Devices By Focused Electron...mentioning

confidence: 99%

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Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies

De Teresa

2023

Mater. Quantum. Technol.

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In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication by means of standard lithography techniques such as optical lithography and electron beam lithography. Then, focused ion beam patterning of superconductors through milling or irradiation is shown, as well as the growth of superconducting devices by means of focused electron and ion beam induced deposition. We suggest that the key benefits of these resist-free direct-growth techniques for quantum technologies include the ability to make electrical nanocontacts and circuit edit, fabrication of high-resolution superconducting resonators, creation of Josephson junctions and SQUIDs for on-tip sensors, patterning of high-Tc SQUIDs and other superconducting circuits, and the exploration of fluxtronics and topological superconductivity.

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Section: Discussionmentioning

confidence: 99%

Section: Direct Growth Of Superconducting Devices By Focused Electron...mentioning

confidence: 99%

Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies

De Teresa

2023

Mater. Quantum. Technol.

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“…Focused ion/electron beam induced deposition (FIBID/ FEBID) is a handy tool for nanofabrication, nanopatterning and engineering of the devices at the nanoscale [1][2][3][4][5]. It is successfully utilized to fabricate nanodevices and patterns with different functionalities such as SQUID devices [6,7], superconducting proximity devices [8,9], 3D structures with vertical alignment [10,11] etc. Compared to other nanofabrication techniques such as electron beam lithography (EBL) and optical lithography techniques, FIBID/FEBID offers advantages as being a single step process devoid of use of masks/resist for the growth of nanodevices [1][2][3][4][5]12].…”

Section: Introductionmentioning

confidence: 99%

Current–voltage characteristics of focused ion beam fabricated superconducting tungsten meanders

Kumar,

Husale,

Saravanan

et al. 2023

Nanotechnology

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We report on the superconducting properties and intermediate resistive steps (IRS) observed in the current-voltage characteristics (IVC) of tungsten meander (MW) structures fabricated using focused ion beam (FIB) technique. Three numbers of MWs were studied with individual wire widths of 240 nm, 640 nm and 850 nm with superconducting transition temperatures (TC) of 4.5 K, 4.55 K and 4.60 K respectively. The measured normal state resistance values at 8 K for these wires are of ~182 kΩ, ~49 kΩ and ~32 kΩ, respectively as a function of increasing wire widths; are higher than the quantum of resistance (h/4e2 = 6.45 kΩ) indicating extreme disorder nature of the fabricated samples. The variation of resistance with respect to temperature (for T < TC) follows the theoretical frame work related to weak-link induced thermally activated phase slip (WL-TAPS) for the MW wire of width ~240 nm, while for other samples the convergence between WL-TAPS and the experimental data are not satisfactory. Though the IRS features are present in all the samples with varying degree of prominence, an external magnetic field causes its evolution demarcating different boundary lines with respect to temperature for all the samples. Finally, we believe that the occurrence of IRS is due to phase slip mechanism which further proliferates through PSCs or PSLs in IVC either with respect to temperature or magnetic field. We also believe that the formation of PSCs or PSLs are due to interaction of vortex-anti vortex pairs present along the channel width due to the disorder in the samples. As per our knowledge, such IRS features are not being reported for W-meander wires fabricated using FIB technique. The observation IRS features is promising for the use of FIB fabricated W nanowires for various quantum applications including single photon detection.

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Roadmap for focused ion beam technologies

Höflich,

Hobler,

Allen

et al. 2023

Applied Physics Reviews

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The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

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Direct-write of tungsten-carbide nanoSQUIDs based on focused ion beam induced deposition

Abstract: NanoSQUIDs are quantum sensors that excel in detecting a small change in magnetic flux with high sensitivity and high spatial resolution. Here, we employ resist-free direct-write Ga+ Focused Ion Beam...

Cited by 4 publications

References 49 publications

Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies

Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies

Current–voltage characteristics of focused ion beam fabricated superconducting tungsten meanders

Roadmap for focused ion beam technologies

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