2004
DOI: 10.1016/j.snb.2003.10.022
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Direct-write laser micromachining and universal surface modification of PMMA for device development

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Cited by 232 publications
(157 citation statements)
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“…The detail of the PMMA laser machining technique has been reported in our previous works. 32,40,41 The microfluidic network shown in Fig. 1(a) was patterned by CO 2 laser ablation on a piece of 70 lm-thick polyester double-sided tape (PET 8018, 3 M, USA) adhered on a Teflon film (ASF-110, Chukoh Ltd., Japan).…”
Section: Fabrication Of Mfuf Chipmentioning
confidence: 99%
“…The detail of the PMMA laser machining technique has been reported in our previous works. 32,40,41 The microfluidic network shown in Fig. 1(a) was patterned by CO 2 laser ablation on a piece of 70 lm-thick polyester double-sided tape (PET 8018, 3 M, USA) adhered on a Teflon film (ASF-110, Chukoh Ltd., Japan).…”
Section: Fabrication Of Mfuf Chipmentioning
confidence: 99%
“…The PMMA layer was fabricated by CO 2 laser direct writing. 27 A transparent indium tin oxide ͑ITO͒ heating layer is stacked beneath the PMMA layer. The ITO heater was patterned by laser-induced backside wet etching.…”
Section: A Chip Design and Fabricationmentioning
confidence: 99%
“…In our laboratory, we have developed several rapid-prototyping methods for fabricating microfluidic chips 27,28 and integrated transparent heaters. 29,30 In this work we report a simple design that provides a variably controllable chemical gradient for cell culturing.…”
Section: Introductionmentioning
confidence: 99%
“…The pattern was drawn in AutoCAD (Autodesk) and then loaded into a CO 2 laser scriber (M-300, Universal Laser Systems or ILS2, Laser Tools & Technics Corp.) to ablate desired patterns on PMMA substrates. [53][54][55] Three layers ( Fig. 1(a), thickness ¼ 1 mm) were bound together via double-sided tapes (8018, 3M) to form the integrated chip ( Fig.…”
Section: A Chip Design and Fabricationmentioning
confidence: 99%