2014
DOI: 10.1007/s11340-013-9832-4
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Direct Stress-Strain Measurements from Bulged Membranes Using Topography Image Correlation

Abstract: This paper discusses an experimental method to characterize thin films as they are encountered in micro-electronic devices. The method enables the measurement of the stress and strain of pressure deflected bulged membranes without using a priori defined bulge equations. An enrichment to the Global Digital Image Correlation method is detailed to capture the membrane strain and curvature while robustly dealing with acquisition noise. The accuracy of the method is analyzed and compared to the standard bulge test … Show more

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Cited by 57 publications
(53 citation statements)
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“…Global regularization is used in the DIC algorithm, meaning that instead of using local correlation of individual subsets, global shape functions are applied to describe the full displacement field. These shape functions are based on polynomials up to the third degree, which can accurately describe bending kinematics [20].…”
Section: Pure Bending Validationmentioning
confidence: 99%
“…Global regularization is used in the DIC algorithm, meaning that instead of using local correlation of individual subsets, global shape functions are applied to describe the full displacement field. These shape functions are based on polynomials up to the third degree, which can accurately describe bending kinematics [20].…”
Section: Pure Bending Validationmentioning
confidence: 99%
“…Here, the displacements of one large facet on the substrate and of another on the gauge end are tracked by a recently developed global DIC (GDIC) code [89][90][91], which is based on a DIC algorithm developed for 2D images by Hild and Roux [92]. During long term testing, lighting conditions may change, thereby affecting the DIC performance, which depends on the image brightness and contrast.…”
Section: Displacement Measurementmentioning
confidence: 99%
“…The contrast and brightness are added as an intensity scaling factor, α I and an offset I 0 respectively. The exact implementation is straigtforward when considering the details by Sutton et al and the GDIC-basis [89,90]. Employing GDIC for displacement measurements enables high resolution.…”
Section: Displacement Measurementmentioning
confidence: 99%
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