Direct rate-constant measurements and theoretical insight into the mechanism of the reactions H + hexamethyldisiloxane and H + tetramethyldisiloxane*

Somnitz, H.; Peukert, Sebastian; Schäffer, Rainer; Fikri, Mustapha; Schulz, Christof

doi:10.1080/00268976.2021.1963871

Cited by 2 publications

(1 citation statement)

References 47 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The plasma chemistry of an argonhexamethyldisiloxane (Ar-HMDSO) plasma and the pathways into formation of dust particles is still an open research topic. Reaction schemes for the formation of plasma species and the formation of dust are difficult to determine, although some serious efforts have been made [71][72][73]. The lack of (both experimental and simulational) knowledge about the plasma chemistry in Ar-HMDSO currently impedes the understanding of mainly the gas phase processes leading to nucleation of nanoparticles.…”

Section: Introductionmentioning

confidence: 99%

Characterization of cyclic dust growth in a low-pressure, radio-frequency driven argon-hexamethyldisiloxane plasma

Donders

Staps

Beckers

2022

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

In a dusty plasma, nanometer-sized solid dust particles can be grown by the polymerization of plasma species from a reactive precursor gas. This type of plasma can be found in large-scale astrophysical objects, as well as in semiconductor manufacturing and material processing. In a laboratory environment, the plasma parameters can be carefully controlled and the dynamics of dust growth as well as the interaction between the plasma and the dust can be studied. In this work, we investigate the cyclic growth of dust particles in a low-pressure, radio-frequency driven argon-hexamethyldisiloxane (Ar-HMDSO) plasma using a multitude of diagnostics in a time-synchronized fashion. The combination of microwave cavity resonance spectroscopy (MCRS), plasma impedance measurements, laser light scattering, laser light extinction measurements and optical emission spectroscopy offers a broad view on the temporal behavior of the plasma in concert with the plasma-grown dust particles. We have studied the variation of several discharge parameters such as plasma power and HMDSO content. Therefore, this multi-diagnostic approach contributes to the fundamental understanding of the mechanisms behind dust growth in low-pressure plasmas.

show abstract

Section: Introductionmentioning

confidence: 99%