Direct production of crystalline superconducting thin films of YBa2Cu3O7 by high-pressure oxygen sputtering

Poppe, U.; Schubert, J.; Arons, R. R.; Evers, Wiel H.; Freiburg, C.; Reichert, W.; Schmidt, Klaus; Sybertz, W.; Urban, K.

doi:10.1016/0038-1098(88)90228-1

Cited by 155 publications

(32 citation statements)

References 17 publications

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“…Thin films of BiMnO 3 were grown on high-oxygen, high-pressure sputtered SrTiO 3 substrates by rfmagnetron sputtering [9]. The optimized substrate temperature and oxygen pressure during growth were of 1123 K at 2x10 -1 mbar (Table 1).…”

Section: Methodsmentioning

confidence: 99%

Magnetic and electrical properties of BiMnO₃ thin films

Grizález

Delgado

Gómez

2007

Phys. Status Solidi (c)

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BiMnO 3 thin films were deposited on single-crystal (001)-oriented SrTiO 3 substrates by rf-magnetron sputtering method. X-ray diffraction was used to analyze the crystal structure of the thin films, indicating that the films were monoclinic with two dominant orientation relationships along the substrate. The first is (111) BiMnO3 ║ (001) SrTiO3; the second is (222) BiMnO3 ║ (002) SrTiO3; other peaks showed that the films were polycrystalline. The roughness of the films was characterized by AFM. R vs. T was measured from 390 K to 15 K using a Keithley Model 167 Programmable Electrometer . Magnetic characterization was carried out by using a quantum design™ magnetometer for magnetization versus temperature and for hysteresis loops at different temperatures. The saturation magnetic moment of 2.8µ B per Mn ion (still fairly smaller than that of the bulk, 3.6µ B ) was observed at 5 K decreasing with increasing temperature.

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Section: Methodsmentioning

confidence: 99%

Magnetic and electrical properties of BiMnO₃ thin films

Grizález

Delgado

Gómez

2007

Phys. Status Solidi (c)

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“…Several thin film growth techniques such as molecular beam epitaxy, [80][81][82][83] pulsed laser deposition, [84][85][86] sputtering, [87][88][89][90][91][92][93] metal-organic chemical vapor deposition, [94][95][96][97][98] and chemical solution deposition 99 etc. have been used to synthesize high quality complex oxide thin films.…”

Section: Synthesis and Characterization Of Thermoelectric Complementioning

confidence: 99%

Thermoelectric and thermal transport properties of complex oxide thin films, heterostructures and superlattices

Ravichandran

2016

J. Mater. Res.

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Over the years, the search for high performance thermoelectric materials has been dictated by the "phonon glass and electron crystal (PGEC)" paradigm, which suggests that low band gap semiconductors with high atomic number elements and high carrier mobility are the ideal materials to achieve high thermoelectric figure of merit. Complex oxides provide alternative mechanisms such as large density of states and strong electron correlation for high thermoelectric efficiency, albeit having low carrier mobility. Due to vast structural and chemical flexibility, they provide a fertile playground to design high efficiency thermoelectric materials. Further, developments in oxide thin film growth methods have enabled synthesis of high quality, atomically precise low dimensional structures such as heterostructures and superlattices. These materials and structures act as excellent model systems to explore nanoscale thermal and thermoelectric transport, which will not only expand the frontier of our knowledge, but also continue to enable cutting edge applications.

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“…This energetic particle flux is directed to the substrate in conventional sputtering geometries leading to selective resputtering of the growing film which modifies the film composition or gives rise -in extreme cases -to etching of the substrate rather than film deposition. To overcome these problems at least four different routes are used: (i) to work at gas pressures high enough to reduce the kinetic energy of the ions striking the substrate below the binding energy [63], (ii) to place the substrate off-axis so it will not face the cathode. A very convincing realization of this idea is the inverted hollow cathode arrangement by Geerk [64], (iii) to design the system for a minimum discharge voltage [65] and (iv) to adjust the target composition for a compensation of the resputtering effects [66].…”

Section: Sputteringmentioning

confidence: 99%

Science and technology of cuprate-based high temperature superconductor thin films, heterostructures and superlattices—the first 30 years (Review Article)

Habermeier

2016

Low Temperature Physics

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Science and technology of cuprate-based high temperature superconductor thin films, heterostructures and superlattices -the first 30 years (Review Article) H.-U. Habermeier Science Consulting International, Niersteinerstr, 28, Stuttgart D 70499, Germany Max-Planck-Institute for Solid State Research, Heisenbergstr, 1, Stuttgart D 70569, Germany E-mail: huh@fkf.mpg.de Received May 30, 2016, published online August 25, 2016 During the three decades after the discovery of superconductivity at high temperatures in copper oxides, intense research activities generated a tremendous progress in both, mastering the scientific challenges underpinning the understanding of the properties of these chemically and structurally complex materials as well as achieving a mature technology in preparing single phase bulk specimens -including single crystals -and epitaxially grown single crystalline thin films. This review covers in addition to more basic physics oriented developments mainly technological aspects of complex oxide thin film deposition as an enabling technology to explore the physics of these materials. It consists of two parts: after a brief introduction to the materials development prior to the discovery of superconducting copper oxides, a description of the relevant properties of copper oxide superconductors with focus on YBa 2 Cu 3 O 7-δ is given, followed by the coverage of essentials of complex oxide thin film deposition technology with the copper oxides at its core. Here, the major physical vapor deposition technologies (evaporation and oxide molecular beam technology, sputtering and pulsed laser deposition) are described followed by an overview of substrate requirements to deposit high quality thin films. Opportunities by choosing special substrates with unique properties far beyond the usual mechanical support for a film are introduced with examples aside from usual lattice mismatch induced strain effects. One is the continuous modification of the strain state by poling ferroelectric oxide substrates linked to a piezoelectric effect, the other is the nanoscale tailoring of substrate step-and-terrace structures resulting in a controllable generation of planar defects in complex oxides, thus contributing to the physics of flux-line pinning in cuprate superconductors. In the second part of this review, first some highlights of single layer thin film research are given such as to tailor thin film orientation, generating well defined antiphase boundaries in YBa 2 Cu 3 O 7-δ thin films as flux-line pinning centers as well as contributions to understand fluctuation conductivity in relation to the pseudogap state. In the last section new developments in high T c cuprate based heterostructures and superlattices are reviewed with a special focus on the opportunities offered by interface-induced electronic interactions.

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Direct production of crystalline superconducting thin films of YBa2Cu3O7 by high-pressure oxygen sputtering

Cited by 155 publications

References 17 publications

Magnetic and electrical properties of BiMnO₃ thin films

Magnetic and electrical properties of BiMnO₃ thin films

Thermoelectric and thermal transport properties of complex oxide thin films, heterostructures and superlattices

Science and technology of cuprate-based high temperature superconductor thin films, heterostructures and superlattices—the first 30 years (Review Article)

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Direct production of crystalline superconducting thin films of YBa2Cu3O7 by high-pressure oxygen sputtering

Cited by 155 publications

References 17 publications

Magnetic and electrical properties of BiMnO3 thin films

Magnetic and electrical properties of BiMnO3 thin films

Thermoelectric and thermal transport properties of complex oxide thin films, heterostructures and superlattices

Science and technology of cuprate-based high temperature superconductor thin films, heterostructures and superlattices—the first 30 years (Review Article)

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Magnetic and electrical properties of BiMnO₃ thin films

Magnetic and electrical properties of BiMnO₃ thin films