2011
DOI: 10.1002/adma.201102401
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Direct Probing of Nanodimensioned Oxide Multilayers with the Aid of Focused Ion Beam Milling

Abstract: The La0.65Sr0.35MnO3 (LSM)/SrTi0.2Fe0.8O3 (STF) multilayer is observed using scanning probe microscopy following a focused‐ion beam milling process with shallow incidence angle. Although the nominal thickness of each layer is about 5 nm, the exposed layers are magnified by several orders of magnitude on the surface after FIB cutting. This procedure enables high spatial resolution and coordinated property measurements directly on the inner layers and at their interfaces.

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Cited by 13 publications
(14 citation statements)
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“…Scanning probe techniques are ideal in revealing local electronic, magnetic or electrochemical properties on the surface 25–29. Nevertheless, challenges arise when attempting to apply them to interrogate interfaces of multilayers buried beneath the surface30 and under the harsh working conditions of SOFC cathodes (high temperatures and in oxygen environments). Previous successful attempts at exposing the local interface properties of oxides to scanning probe characterization26, 27 have not provided a generalized capability to expose buried interfaces in a controllable fashion and have been limited to room temperature measurements.…”
Section: Introductionmentioning
confidence: 99%
“…Scanning probe techniques are ideal in revealing local electronic, magnetic or electrochemical properties on the surface 25–29. Nevertheless, challenges arise when attempting to apply them to interrogate interfaces of multilayers buried beneath the surface30 and under the harsh working conditions of SOFC cathodes (high temperatures and in oxygen environments). Previous successful attempts at exposing the local interface properties of oxides to scanning probe characterization26, 27 have not provided a generalized capability to expose buried interfaces in a controllable fashion and have been limited to room temperature measurements.…”
Section: Introductionmentioning
confidence: 99%
“…3. The buried LSC 113/214 interfaces in ML structure are exposed to the surface by grazing incidence FIB milling to facilitate STM/STS characterization (16), as shown in Fig. 2 (a) and (b).…”
Section: Resultsmentioning
confidence: 99%
“…Figure adapted from ref. (16) The PLD was performed using a KrF excimer laser with wavelength of 248 nm. The films were deposited at 700 o C under 10 mTorr oxygen pressure.…”
Section: Methodsmentioning
confidence: 99%
“…Lastly, PLD opens up a more convenient route for fabricating multilayer systems or single films with compositional variations. This can be easily realized by rapidly rastering the laser beam between different targets under computer controlled conditions [18,19].…”
Section: Materials Processingmentioning
confidence: 99%
“…A novel approach for exposing the interface in multilayer structures was recently developed, using shallow angle focused ion beam (FIB) milling which expands the interface region from the nanometer to the micrometer scale, facilitating the characterization of interfaces by scanning tunneling microscopy/spectroscopy (STM/S). Figure 4 schematically shows how a combination of FIB milling and STM can be used to study the electronic structure near interfaces, first demonstrated at room temperature with a superlattice of (La, Sr)MnO 3 (LSM) and STF [19]. This method has been further extended recently to high temperatures and an oxygen gas environment by combining FIB and in situ STM/S [27], thereby demonstrating for the first time the ability to probe the electronic structure across heterointerfaces with nanoscale resolution at high temperature and in an oxygen/gas environment.…”
Section: Chemical Structural and Morphologicalmentioning
confidence: 99%