Direct Patterning of Perovskite Nanocrystals on Nanophotonic Cavities with Electrohydrodynamic Inkjet Printing

Abstract

Overcoming the challenges of patterning luminescent materials will unlock additive and more sustainable paths for the manufacturing of next-generation on-chip photonic devices. Electrohydrodynamic (EHD) inkjet printing is a promising method for deterministically placing emitters on these photonic devices. However, the use of this technique to pattern luminescent lead halide perovskite nanocrystals (NCs), notable for their defect tolerance and impressive optical and spin coherence properties, for integration with optoelectronic devices remains unexplored. In this work, we additively deposit nanoscale CsPbBr3 NC features on photonic structures via EHD inkjet printing. We perform transmission electron microscopy of EHD inkjet printed NCs to demonstrate that the NCs’ structural integrity is maintained throughout the printing process. Finally, NCs are deposited with sub-micrometer control on an array of parallel silicon nitride nanophotonic cavities and demonstrate cavity–emitter coupling via photoluminescence spectroscopy. These results demonstrate EHD inkjet printing as a scalable, precise method to pattern luminescent nanomaterials for photonic applications.

Design rules for obtaining narrow luminescence from semiconductors made in solution

“…For instance, improvements in radiative rates by maximizing the Purcell Factor can be realized through novel cavity designs for colloidal materials integration 294 and also by development of methods for nanoscale positioning and integration of solution-processable emitters. 295,296…”

Deterministic Quantum Light Arrays from Giant Silica-Shelled Quantum Dots

“…Dispersions of colloidal materials are compatible with various solution-phase integration techniques. ,,, Straightforward integration methods, such as spin-coating, drop-casting, capillary assembly, and doctor blade coating, are often performed on patterned or templated substrates with nano- or microscale traps generated by electron beam lithography to enable precise positioning of isolated single QDs. − Deterministic and scalable positioning of one or a few QDs using these approaches can be realized when the QD size is maximized and/or the size of the predefined trap is minimized. , A different route for precise placement is to manipulate the location of a QD on a substrate with atomic force microscopy and/or scanning electron microscopy (SEM) with a nanomanipulator; − however, this approach does not offer a feasible path to scaling. Most recently, electrohydrodynamic inkjet printing has been demonstrated to deposit droplets of nanoparticles on an array of nanocavities . For this technique, although the production of small ink droplets containing a few nanoparticles was achieved, targeting one particle per droplet remains difficult due to the small size of the nanoparticles and the constraints imposed by the nozzle diameter.…”

“…Most recently, electrohydrodynamic inkjet printing has been demonstrated to deposit droplets of nanoparticles on an array of nanocavities. 39 For this technique, although the production of small ink droplets containing a few nanoparticles was achieved, targeting one particle per droplet remains difficult due to the small size of the nanoparticles and the constraints imposed by the nozzle diameter. Furthermore, implementing available techniques for large-scale patterning of QD single-photon emitters is problematic due to the QD's small size, surface chemistry, and/or poor stability in ambient conditions.…”

Deterministic Quantum Light Arrays from Giant Silica-Shelled Quantum Dots

“…Most recently, electrohydrodynamic inkjet printing has been demonstrated to deposit droplets of nanoparticles on an array of nano cavities. 60 For this technique, although the production of small ink droplets containing a few nanoparticles was achieved, targeting one particle per droplet remains difficult due to the small size of the nanoparticles and the constraints imposed by the nozzle diameter. Furthermore, implementing available techniques for large-scale patterning of QD single photon emitters is problematic due to the QD's small size, surface chemistry, and/or poor stability in ambient condition.…”