Direct Monte-Carlo simulation of dry e-beam etching of resist

Sidorov, F. A.; Rogozhin, A. E.; Bruk, M.A.; Zhikharev, E. N.

doi:10.1016/j.mee.2020.111313

Cited by 4 publications

(1 citation statement)

References 33 publications

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“…Instead of using the common approach based on the PMMA radiation scission yield, electron–electron scattering events leading to PMMA main-chain scissions were simulated with the more accurate Monte-Carlo technique using the scission probability (

where

denotes a random number from the uniform distribution on [0, 1). The value of

for room temperature (25 °C) was determined by the simulation of the experimental radiation scission yield using the approach described in our previous paper [ 24 ] and comprised 0.05.…”

Section: Simulation Of E-beam-exposed Pmma Viscosity Profilementioning

confidence: 99%

Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile

Sidorov,

Rogozhin

2023

Polymers

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This paper presents a new approach to the simulation of the thermal reflow of e-beam-exposed polymethyl methacrylate (PMMA) taking into account its nonuniform viscosity profile. This approach is based on numerical “soapfilm” modeling of the surface evolution, processed by the free software “Surface Evolver” in area normalization mode. The PMMA viscosity profile is calculated via the simulation of the exposed PMMA number average molecular weight distribution using the Monte-Carlo method and empirical formulas. The relation between the PMMA viscosity and the mobility of PMMA surface vertices was determined via the thermal reflow simulation for uniform PMMA gratings using analytical and numerical approaches in a wide viscosity range. The agreement between reflowed profiles simulated with these two approaches emphasizes the applicability of “soapfilm” modeling in the simulation of polymer thermal reflow. The inverse mobility of PMMA surface vertices appeared to be proportional to the PMMA viscosity with a high precision. The developed approach enables thermal reflow simulations for complex nonuniform structures, which allows the use of predictable reflow as a stage of 3D microfabrication.

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where

denotes a random number from the uniform distribution on [0, 1). The value of

for room temperature (25 °C) was determined by the simulation of the experimental radiation scission yield using the approach described in our previous paper [ 24 ] and comprised 0.05.…”

Section: Simulation Of E-beam-exposed Pmma Viscosity Profilementioning

confidence: 99%

Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile

Sidorov,

Rogozhin

2023

Polymers

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The practical process of manufacturing poly(methyl methacrylate)-based scaffolds having high porosity and high strength

Indra

Razi

Jasmayeti

et al. 2023

Journal of the Mechanical Behavior of Biomedical Materials

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Microscopic simulation of e-beam induced PMMA chain scissions with temperature effect

Sidorov

Rogozhin

2020

J. Phys.: Conf. Ser.

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This study presents microscopic quantitative model of e-beam induced poly-methylmethacrylate (PMMA) main-chain scissions. Scission processes are supposed to be caused by ester side group elimination, competing with hydrogen abstraction processes. Experimental values of PMMA radiation scission yield at different temperatures were obtained using direct Monte-Carlo algorithm for the simulation of e-beam scattering in PMMA/Si structure and detailed PMMA layer model for the simulation of exposed PMMA molecular weight distribution. The radiation scission yield increase at higher temperatures is associated by the increase of probability of remote PMMA main-chain scission, which follows the ester side group elimination. Temperature dependence of remote scission probability for the temperature range 20-180 °C is determined.

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Direct Monte-Carlo simulation of dry e-beam etching of resist

Cited by 4 publications

References 33 publications

Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile

Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile

The practical process of manufacturing poly(methyl methacrylate)-based scaffolds having high porosity and high strength

Microscopic simulation of e-beam induced PMMA chain scissions with temperature effect

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