Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma

Karkari, S. K.; Ellingboe, A. R.; Gaman, Cezar

doi:10.1063/1.2971236

Cited by 36 publications

(24 citation statements)

References 13 publications

(27 reference statements)

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“…Typical values are 2 kV pp (2.5 Amps) and 250 V pp (25 Amps) for the 2 MHz and 27 MHz signals into the plasma, respectively. In combination with the symmetric plasma system, the plasma potential (V p ) oscillates predominantly at the 2 MHz rf voltage with an associated high frequency oscillation at 27 MHz [22,23], with the mean time-averaged V p reaching several hundreds of volts above ground. The advantage of dual-rf-frequency power is that it provides independent control of the ion current and ion energy onto the boundary [24,25].…”

Section: Techniquesmentioning

confidence: 99%

Influence of plasma chemistry on oxygen triplets

2011

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Abstract. The plasma chemistry of fluorocarbon-oxygen-argon discharges and its influence on prominent oxygen triplets are studied. The oxygen 777 triplet is very important for the measurement of atomic oxygen in low pressure plasmas, since the 777.417 nm spectral line is frequently used for actinometry. In this paper we identify changes in the individual 777 triplet lines arising from cascade effects from higher energy levels of oxygen, and from resonant energy transfer from energetic carbon atoms in carbon-rich plasmas. The lower energy levels of three oxygen triplets (544 nm, 616 nm, 645 nm) are the upper states of the 777 triplet. Increased emission intensity from the 544, 616, and 645 triplets result in changes to the relative intensity of the individual lines of the 777 triplet, and this can lead to errors in using the 777 triplet, e.g.

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Section: Techniquesmentioning

confidence: 99%

Influence of plasma chemistry on oxygen triplets

2011

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“…The ion and 2.5x10 16 3.0x10 16 3.5x10 16 4.0x10 16 4.5x10 16 5.0x10 16 5.5x10 16 6.0x10 16 6.5x10 16 7. 2.5x10 16 3.0x10 16 3.5x10 16 4.0x10 16 4.5x10 16 5.0x10 16 5.5x10 16 6.0x10 16 6.5x10 16 7. 2.5x10 16 3.0x10 16 3.5x10 16 4.0x10 16 4.5x10 16 5.0x10 16 5.5x10 16 6.0x10 16 6.5x10 16 7.…”

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confidence: 99%

Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field

et al. 2018

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An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufacturing. We demonstrate that a simultaneous control of these quantities is possible by a suitable choice of a static magnetic field applied parallel to the plane electrodes in a standard single frequency capacitively coupled plasma device. Our particle-in-cell simulations show a 60% reduction in the sheath width (that improves control of ion energy) and a four fold increase in the ion flux at the electrode as a consequence of the altered ion and electron dynamics due to the ambient magnetic field. A detailed analysis of the particle dynamics is presented and the optimized operating parameters of the device are discussed. The present technique offers a simple and attractive alternative to conventional dual frequency based devices that often suffer from undesirable limitations arising from frequency coupling and electromagnetic effects.

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“…In the case of magnetic fields, the helicoidal trajectories of electrons allow extending the path to anode, consequently increasing the probability of electron collision with gas components. In the case of energy transfer by induction, the radiofrequency and middle-frequency change the electron density oscillation, which increases the electron energy and, consequently, the ionization events are enhanced due to the interactions of more energetic electrons with neutral atoms and molecules [12]. Furthermore, a hot filament can be used in order to increase the electron density by direct injection of electrons [8].…”

Section: Introductionmentioning

confidence: 99%

Hydrogenated amorphous carbon thin films deposition by pulsed DC plasma enhanced by electrostatic confinement

Dufrène

Cemin

Soares

et al. 2014

Surface and Coatings Technology

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Diamond-like carbon (DLC) is a metastable form of amorphous carbon with attractive properties such as high hardness, low friction, chemical inertness and high wear resistance. In this work, hydrogenated amorphous carbon (a-C:H) thin films were deposited using a plasma enhanced chemical vapor deposition technique by pulsed DC plasma with a simple, low-cost and efficient arrangement of multi-cathodes and multi-anodes in order to enhance the plasma by electrostatic confinement. The samples were characterized by Scanning Electron Microscopy, Energy Dispersive X-ray Spectroscopy, Elastic Recoil Detection Analysis, Raman Spectroscopy, and nanoindentation measurements. a-C:H thin films show an homogeneous hydrogen profile along the films deposited at −600 V and −800 V and variable working pressure. According to Raman spectra, both the I D /I G ratio and the G-peak position increase at higher voltages (more remarkable dependence) and lower working pressures (less remarkable dependence). Moreover, the hardness depends on working conditions such as power supply voltage and total working pressure. The electrostatic confinement enhances the deposition rates of a-C:H thin films up to values of 0.9 μm·h −1 , which is almost double than those previously published by pulsed DC plasma in similar conditions. The Raman spectra follow the stage 2 of an established model and this structure transition may explain the hardness behavior.

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Direct measurement of spatial electron density oscillations in a dual frequency capacitive plasma

Cited by 36 publications

References 13 publications

Influence of plasma chemistry on oxygen triplets

Influence of plasma chemistry on oxygen triplets

Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field

Hydrogenated amorphous carbon thin films deposition by pulsed DC plasma enhanced by electrostatic confinement

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