Direct Laser Lithography: Single-Tool Patterning for Nonlinear Integrated Quantum Optics

Protte, Maximilian; Verma, Varun B.; Brockmeier, Julian; Höpker, Jan Philipp; Bruch, Felix vom; Lengeling, Sebastian; Ricken, Raimund; Eigner, Christof; Silberhorn, Christine; Mirin, Richard P.; Nam, Sae Woo; Bartley, Tim J.

doi:10.1364/cleo_si.2022.stu4f.1

Conference on Lasers and Electro-Optics 2022

DOI: 10.1364/cleo_si.2022.stu4f.1

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Direct Laser Lithography: Single-Tool Patterning for Nonlinear Integrated Quantum Optics

Maximilian Protte

Varun B. Verma

Julian Brockmeier

et al.

Abstract: We present direct laser lithographic patterning of low-loss waveguides, periodic poling structures for single photon generation, electro-optical modulators and superconducting detectors based on WSi, for integrated quantum circuits in titanium in-diffused lithium niobate.

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Direct Laser Lithography: Single-Tool Patterning for Nonlinear Integrated Quantum Optics

Abstract: We present direct laser lithographic patterning of low-loss waveguides, periodic poling structures for single photon generation, electro-optical modulators and superconducting detectors based on WSi, for integrated quantum circuits in titanium in-diffused lithium niobate.

Cited by 0 publications

References 2 publications

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