Direct ink writing combined with metal-assisted chemical etching of microchannels for the microfluidic system applications

Peng, Yong; Jiang, Shulan; Xia, Li; Yin, Xiaolin; Yu, Bingjun; Qian, Linmao

doi:10.1016/j.sna.2020.112320

Cited by 16 publications

(9 citation statements)

References 38 publications

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“…Furthermore, it was demonstrated through in-situ characterization approach with SEM and AFM that the structural features of master grating were perfectly replicated, as shown in Figure 27. Friction-induced selective etching provide great opportunities in realizing nanochannels [69,97], which was widely used in fields covering microfluidics, chemistry, biology and so forth. Wang et al [69] designed, fabricated and characterized a nanofluidic device based on frictioninduced selective etching.…”

Section: Applications Of Friction-induced Nanofabricationmentioning

confidence: 99%

Friction-Induced Nanofabrication: A Review

Qian

2021

Chin. J. Mech. Eng.

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As the bridge between basic principles and applications of nanotechnology, nanofabrication methods play significant role in supporting the development of nanoscale science and engineering, which is changing and improving the production and lifestyle of the human. Photo lithography and other alternative technologies, such as nanoimprinting, electron beam lithography, focused ion beam cutting, and scanning probe lithography, have brought great progress of semiconductor industry, IC manufacturing and micro/nanoelectromechanical system (MEMS/NEMS) devices. However, there remains a lot of challenges, relating to the resolution, cost, speed, and so on, in realizing high-quality products with further development of nanotechnology. None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time, and it is essential to explore new nanofabrication methods. As a newly developed scanning probe microscope (SPM)-based lithography, friction-induced nanofabrication provides opportunities for maskless, flexible, low-damage, low-cost and environment-friendly processing on a wide variety of materials, including silicon, quartz, glass surfaces, and so on. It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates, microfluidic devices, and micro/nano optical structures. This paper hereby involved the principals and operations of friction-induced nanofabrication, including friction-induced selective etching, and the applications were reviewed as well for looking ahead at opportunities and challenges with nanotechnology development. The present review will not only enrich the knowledge in nanotribology, but also plays a positive role in promoting SPM-based nanofabrication.

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Section: Applications Of Friction-induced Nanofabricationmentioning

confidence: 99%

Friction-Induced Nanofabrication: A Review

Qian

2021

Chin. J. Mech. Eng.

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“…At present, the best candidates or microfluidic devices through 3D-printing technology are stereolithography (SLA) 18 , 19 , digital light projection (DLP) 20 , 21 , fused deposition modeling (FDM) 22 – 24 , and direct ink writing (DIW) 25 , 26 . SLA and DLP are based on the selective curing of a photosensitive polymer to print the desired structures.…”

Section: Introductionmentioning

confidence: 99%

Time-efficient fabrication method for 3D-printed microfluidic devices

Jin

Xiong

et al. 2022

Sci Rep

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Recent developments in 3D-printing technology have provided a time-efficient and inexpensive alternative to the fabrication of microfluidic devices. At present, 3D-printed microfluidic systems face the challenges of post-processing, non-transparency, and being time consuming, limiting their practical application. In this study, a time-efficient and inexpensive fabrication method was developed for 3D-printed microfluidic devices. The material for 3D-printed microfluidic chips is Dowsil 732, which is used as a sealant or encapsulant in various industries. The curing time and surface hydrophobicity of the materials were evaluated. The results indicated that the surface of Dowsil 732 is hydrophilic. An optimization model of the direct ink writing method is proposed to establish a time-efficient and accurate fabrication method for microfluidic devices. The results indicate that the optimization model can effectively describe the change trend between printing speed, printing pressure, and channel wall accuracy, and the model accuracy rate exceeds 95%. Three examples—a micromixer, concentration gradient generator, and droplet generator—were printed to demonstrate the functionality and feasibility of the fabrication method.

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“…Traditional microelectronics manufacturing technology mainly focuses on silicon-based substrates and lithography, which is not suitable for the fabrication of liquid metal-based electronics. Recently, various studies have explored printing liquid metal on a soft substrate, including direct writing ( Guo et al, 2018 ; Peng et al, 2020 ), injection printing ( Yang et al, 2017 ; Teng et al, 2019a ; Teng et al, 2019b ), mask printing ( Kramer et al, 2013 ; Liu et al, 2019 ), photolithography ( Hirsch et al, 2016 ; An et al, 2022 ), and magnetic patterning ( Guo et al, 2019 ; Xu et al, 2019 ; Zhang et al, 2021 ). Nevertheless, when the printing resolution is less than 50 μm, the as-prepared liquid metal patterns usually lack uniformity and connectivity, which result from the significant liquidity and high surface tension of the liquid metal.…”

Section: Introductionmentioning

confidence: 99%

Controlling the oxidation and wettability of liquid metal via femtosecond laser for high-resolution flexible electronics

Zhang

Chen

et al. 2022

Front. Chem.

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Liquid metal-based electronic devices are attracting increasing attention owing to their excellent flexibility and high conductivity. However, a simple way to realize liquid metal electronics on a microscale without photolithography is still challenging. Herein, the wettability and adhesion of liquid metal are controlled by combining the stirring method, femtosecond laser microfabrication, and sacrificial layer assistant. The adhesive force of liquid metal is dramatically enhanced by adjusting its oxidation. The wetting area is limited to a micro-pattern by a femtosecond laser and sacrificial layer. On this basis, a high-resolution liquid metal printing method is proposed. The printing resolution can be controlled even less than 50 μm. The resultant liquid metal pattern is applied to electronic skin, which shows uniformity, flexibility, and stability. It is anticipated that this liquid metal printing method will hold great promise in the fields of flexible electronics.

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Direct ink writing combined with metal-assisted chemical etching of microchannels for the microfluidic system applications

Cited by 16 publications

References 38 publications

Friction-Induced Nanofabrication: A Review

Friction-Induced Nanofabrication: A Review

Time-efficient fabrication method for 3D-printed microfluidic devices

Controlling the oxidation and wettability of liquid metal via femtosecond laser for high-resolution flexible electronics

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