Direct Growth of MoS₂ and WS₂ Layers by Metal Organic Chemical Vapor Deposition

Abstract

For the growth of 2D transition metal dichalcogenides, such as molybdenum (MoS2) and tungsten disulfides (WS2), metalorganic chemical vapor deposition (MOCVD) routes are favorable due to their superior scalability, the possibility to tune the processing temperatures by a proper choice of reactants thus avoiding the need for a postdeposition treatment. Herein, the first example of a promising MOCVD route for the direct fabrication of MoS2 and WS2 layers under moderate process conditions is reported. This straightforward route is successfully realized by the combination of metalorganic precursors of Mo or W bearing the amidinato ligand with just elemental sulfur. The formation of stoichiometric hexagonal 2H‐MoS2 and 2H‐WS2 is demonstrated which is confirmed by Raman, X‐ray diffraction, and X‐ray photoelectron spectroscopy studies. The deposited layers are evaluated for their electrocatalytic activity in hydrogen evolution reaction as a proof of principle for application in water splitting devices.

Controllable Synthesis of Two‐Dimensional Molybdenum Disulfide (MoS2) for Energy‐Storage Applications

“…[54] For example, compared with halogen-and oxygen-containing precursors, the application of imido-amidinato-based precursors for MOCVD of MoS 2 materials is significantly beneficial in terms of purity,safety,and convenience. [55]…”

“…In the pursuit of a one‐step MOCVD route for the deposition of wafer‐scale MoS 2 layers, researchers diverted their attention to the implementation of tailored metal–organic precursors, with the prospect of realizing a low‐temperature, fast, and simple process . For example, compared with halogen‐ and oxygen‐containing precursors, the application of imido–amidinato‐based precursors for MOCVD of MoS 2 materials is significantly beneficial in terms of purity, safety, and convenience …”

Optimization of the Hydrogen‐Adsorption Free Energy of Ru‐Based Catalysts towards High‐Efficiency Hydrogen Evolution Reaction at all pH

“…[3] Pt-based electrocatalysts have shown the highestp erformance towards the hydrogen evolution reaction( HER) process with almost no overpotential and robust stability, but its rarity and the high cost limit the practical application. [4,5] Non-Pt electrocatalysts, particularly the transition-metal compounds, including metal phosphides, [6][7][8][9][10] sulfides, [11,12] selenides, [13,14] carbides, [15] borides, [16] and nitrides [17] have increasingly aroused attention.U nfortunately, most of them have no Pt-like activity or only favorable activity in acid media. Considering the different environments in application, developing catalysts with outstanding catalytic per-formance andh igh stabilityi np H-universal solutions is an urgent need.…”

“…Pt‐based electrocatalysts have shown the highest performance towards the hydrogen evolution reaction (HER) process with almost no overpotential and robust stability, but its rarity and the high cost limit the practical application . Non‐Pt electrocatalysts, particularly the transition‐metal compounds, including metal phosphides, sulfides, selenides, carbides, borides, and nitrides have increasingly aroused attention. Unfortunately, most of them have no Pt‐like activity or only favorable activity in acid media.…”

Effect of the chemical vapor deposition condition on the electrochemically catalytic efficiency for hydrogen evolution reaction in MoS2 nanoparticles

“…Generally, MoS 2 nanostructure with a small number of layers (around 2~4 layers) might be a great alternative of noble-metal-based HER electrocatalysts. However, synthesis a large scale of few-layer MoS 2 nanostructure directly on conductive substantial has been still difficult 18 . Here, we used the MOCVD technique to grow MoS 2 nanoparticles directly on conductive graphite, which was applied for HER electrochemical working electrode.…”