Direct Femtosecond Laser Writing of Optical Waveguides in Dielectrics

Chen, Feng; Aldana, Javier Rodríguez Vázquez de

doi:10.1007/978-3-030-59313-1_6

Cited by 4 publications

(2 citation statements)

References 129 publications

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“…A 2 near the surface of the sample (Fig. 4 a) is found to strongly guide the light and is likely attributable to the lower density of A 1 29 . As the pulse continues to propagate deeper, it is spatially degraded due to passing through the ionization that occurs at A 1 and results in the formation of a diffused structure A 3 (Fig.…”

Section: Resultsmentioning

confidence: 96%

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Femtosecond laser induced low propagation loss waveguides in a lead-germanate glass for efficient lasing in near to mid-IR

Khalid

Chen

Ebendorff-Heidepreim

et al. 2021

Sci Rep

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To support the growing landscape of near to mid-IR laser applications we demonstrate a range of low propagation loss femtosecond laser (FSL) written waveguides (WGs) that have achieved guided-mode laser operation in a rare earth (RE) doped lead-germanate glass. The WGs are fabricated in both the athermal and thermal FSL writing regimes using three different pulse repetition frequencies (PRF): 100 kHz (athermal); 1 MHz; and 5 MHz (thermal). The lasing capability of Yb3+ doped lead-germanate waveguides is verified in the near-IR. The refractive index contrast (∆n) for 100 kHz WGs is ~ 1 × 10–4, while for 5 MHz, ∆n increases to ~ 5 × 10–4. The WGs in the thermal regime are less effected by self-focusing and are larger in dimensions with reduced propagation losses. For the 1 MHz repetition rate thermal writing regime we report a low propagation loss WG (0.2 dB/cm) and demonstrate laser operation with slope efficiencies of up to ~ 28%.

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Section: Resultsmentioning

confidence: 96%

“…A less dense glass volume leads to a lower refractive index and thus results in the formation of an anti-guiding or dark structure (A 1 in Fig. 4 a) at the FSL irradiated area 22 , 29 .…”

Section: Resultsmentioning

confidence: 99%

Femtosecond laser induced low propagation loss waveguides in a lead-germanate glass for efficient lasing in near to mid-IR

Khalid

Chen

Ebendorff-Heidepreim

et al. 2021

Sci Rep

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Femtosecond laser-induced optical waveguides in crystalline garnets: Fabrication and application

Shen¹,

Jia²,

Chen³

2023

Optics & Laser Technology

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Refining silicon nitride waveguide quality through femtosecond laser annealing

Wang,

Chen,

Hou

et al. 2024

Sci Rep

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We present a method for modification of silicon nitride (Si3N4) waveguide resonators using femtosecond laser annealing. The quality (Q) factor of the waveguide resonators can be improved by approximately 1.3 times after annealing. Notably, waveguides that originally had a high Q value maintained their quality after the annealing process. However, those with a lower initial Q value experienced a noticeable improvement post-annealing. To characterize the annealing effect, the surface morphologies of Si3N4 films, both pre- and post-annealing, were analyzed using atomic force microscopy. The findings suggest a potential enhancement in surface refinement. Furthermore, Raman spectroscopy confirmed that the Si3N4 film's composition remains largely consistent with its original state within the annealing power range of 0.6–1.6 W. This research underscores the potential of femtosecond laser annealing as an efficient, cost-effective, and localized technique for fabricating low-loss integrated photonics.

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Direct Femtosecond Laser Writing of Optical Waveguides in Dielectrics

Cited by 4 publications

References 129 publications

Femtosecond laser induced low propagation loss waveguides in a lead-germanate glass for efficient lasing in near to mid-IR

Femtosecond laser induced low propagation loss waveguides in a lead-germanate glass for efficient lasing in near to mid-IR

Femtosecond laser-induced optical waveguides in crystalline garnets: Fabrication and application

Refining silicon nitride waveguide quality through femtosecond laser annealing

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