Direct fabrication of thin film gold resistance temperature detection sensors on a curved surface using a flexible dry film photoresist and their calibration up to 450 °C

Abstract

High efficiency heat exchangers, such as intercoolers and recuperators, are composed of complex and compact structures to enhance heat transfer. This limits the installation of conventional temperature sensors to measure the temperature inside the heat exchanger without flow disturbance. To overcome this limitation, we have developed a direct patterning method in which metal is sputtered onto a curved surface using film photoresist and the fabrication of thin film Au resistance temperature detection (RTD) temperature sensors. A photosensitive film resist has been used to overcome the difficulty of 3-dimensional photolithography on a curved surface. The film resist after 2-dimensional photolithography is laminated over an alumina rod which is deposited with Au as an RTD sensing material. The Au metal is etched chemically, and the film resist is removed to form the thin film Au-RTD temperature sensors. They are calibrated by measuring the resistance change against temperature in a thermally controlled furnace. The second order polynomial fit shows good agreement with the measured temperatures with a standard deviation of 0.02 for the temperature range of 20-450 • C. Finally, the performance of the Au-RTD temperature sensors was evaluated.

Space-Filling Curve Resistor on Ultra-Thin Polyetherimide Foil for Strain Impervious Temperature Sensing

“…These range from a sensor on stretchable material including stretchable cables [ 11 ] to a complex array consisting of several resistive sensors that can determine temperature and strain through intelligent interconnection [ 12 ]. There are also approaches to manufacture sensors directly on already curved surfaces by photolithography [ 13 ]. However, these methods are complex and usually require several materials and many manufacturing steps to achieve the desired effect.…”

A Transformative Gold Patterning through Selective Laser Refining of Cyanide

“…The drawbacks found in its refinement process, for example, process complexity and costly equipment, even escalate for the fabrication of Au micropatterns. In general, the Au film is formed by sputtering [ 1 ], evaporation [ 2 ], and chemical vapor deposition [ 3 , 4 ], and then the wet etching [ 5 ], photolithography [ 6 , 7 ], and lift-off [ 8 ] techniques are usually conducted for patterning of the Au electrode on the pre-fabricated Au film, which are well-known to be time-consuming and high-cost procedures.…”

Nickel Based RTD Fabricated via Additive Screen Printing Process for Flexible Electronics

“…Common resistive metals used in the fabrication of the RTD are metals such as platinum (Pt) [2], nickel (Ni) [5] and copper (Cu) [6]. In addition, gold (Au) and silver (Ag) have also been reported for temperature sensing applications [7], [8]. Among these, Pt is the commonly used resistive element in the fabrication of RTD due to its high accuracy in measuring temperatures.…”

“…However, it is relatively expensive and suffers from a low response and TCR value (0.31 %/ • C) [2], [9]. Similarly, Au and Ag are also expensive and have low TCR values (0.34 %/ • C and 0.1%/ • C) [7], [8]. Cu is prone to oxidation at low temperature (<300 • C), thereby restricting the range of temperature sensing [10].…”