1998
DOI: 10.1016/s0169-4332(98)00319-5
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Direct evaluation of the sp3 content in diamond-like-carbon films by XPS

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Cited by 642 publications
(321 citation statements)
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“…These binding energy values are similar with those reported in Ref. [25,26]. It indicates that the surfaces of Si-DLC films are rich in sp 2 bonded carbon.…”
Section: X-ray Photoelecron Spectroscopy (Xps) Studiessupporting
confidence: 90%
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“…These binding energy values are similar with those reported in Ref. [25,26]. It indicates that the surfaces of Si-DLC films are rich in sp 2 bonded carbon.…”
Section: X-ray Photoelecron Spectroscopy (Xps) Studiessupporting
confidence: 90%
“…5 (g)) was deconvoluted into five components at 284.4, 285.1, 286.6, 288.5 and 293.5 eV. These peak positions are assigned to the binding energy of C _ C, C-C, C-O, C _ O bonded network and π-excitation respectively [25][26][27][28][29]45]. The ratio of the C _ C to C-C bonds was similar to that of the untreated Si-DLC film shown in Fig.…”
Section: X-ray Photoelecron Spectroscopy (Xps) Studiesmentioning
confidence: 99%
“…51,60 The reasons for such a large separation between the two components are not clear, however, fitting with a smaller difference in binding energy did not give a good agreement with the experimental spectrum. A similar separation between sp 2 and sp 3 components was found in Ref.…”
Section: Figmentioning
confidence: 87%
“…The fitting with one component for oxygen-containing groups gave a 1.5± 0.1 eV difference in the binding energy of the sp 2 and sp 3 components, which is significantly larger than the differences of 0.9 eV reported for amorphous carbon 49,59 and 0.8 eV for diamondlike-carbon films. 51,60 Therefore, we excluded this fit from our consideration.…”
Section: Figmentioning
confidence: 99%
“…Gold (Au 4 7/2 f ) and copper (Cu 2 3/2 p ) lines at 84.0 and 932.6 eV, respectively, were used for calibration. To compensate for any charging effects, the main carbon peak was calibrated at 285.5 eV, a value measured on conductive diamond containing nitrogen [25][26][27] . The carbon peak and its sub peaks were studied since quantifying the oxygen can be deluding due to physisorbed water molecules or inorganic dusts that can influence the quantitative elemental analysis on the diamond surface.…”
Section: B Time Domain Thermoreflectancementioning
confidence: 99%