A nanocrystalline diamond (NCD) film is a polycrystalline diamond layer constructed from diamond crystals of a size from several nm to several tens of nm. Recently, NCDs have been generating interest in the materials field of chemical vapor deposition (CVD) diamond due to its potential industrial applications.The major advantage of the NCD film in practical use is its small crystal size, which gives a smooth surface and transparency to the film. The surface roughness of a polycrystalline diamond film is comparable to its crystal size. The rough surface of a film with a large crystal size causes high light scattering, poor friction and inadequate wear performance. Consider the use of conventional polycrystalline diamond films comprising micrometer-sized diamond crystals for optical or tribological coatings as an example: the required transparency or friction and wear performance are compromised by the large surface roughness. Thus, mechanical or chemical polishing is