Dimension effect on mechanical behavior of silicon micro-cantilever beams

Liu, Hsien‐Kuang; Pan, Chi Hsiang; Liu, Pang-Ping

doi:10.1016/j.measurement.2007.12.007

Cited by 48 publications

(25 citation statements)

References 12 publications

(9 reference statements)

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“…Cantilevers made by bulk manufacturing can result to dimensional deviations of 1 to 2μm [19]. Thickness is particularly the major sources of error in the determination of the Young's modulus and yield strength.…”

Section: Experimental Limitationsmentioning

confidence: 99%

Characterization of Microdevices by Nanoindentation

Diop¹

2012

Nanoindentation in Materials Science

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Section: Experimental Limitationsmentioning

confidence: 99%

Characterization of Microdevices by Nanoindentation

Diop¹

2012

Nanoindentation in Materials Science

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“…According to the applied loading, the test configuration and the shape of the specimen, bending tests can be broadly classified in: axisymmetric bending test [23], microbeam test [24], bulge test [25], MDE (Membrane Deflection Test) test [26], M-test [27], wafer curvature test [28] and the more recent on-chip bending tests [29]. Each of the aforementioned tests allows to determine a specific mechanical quantity, as the Young modulus, the fracture and the yield strength, and the residual stresses.…”

Section: Bending Testsmentioning

confidence: 99%

“…Indeed, owing to their unique microstructure, the mechanical properties at small length scale are generally different with respect to those obtained by standard test methodologies applied to bulk macro-samples [5,6]. It is well-known that material properties are affected by sample size and fabrication process [7][8][9]. For instance, it has been already demonstrated that strong variations of the mechanical properties arise as sample characteristic dimension approaches or is smaller than 100 nm [10].…”

Section: Introductionmentioning

confidence: 99%

A Review of Patented Works on the Mechanical Characterization of Materials at Micro- and Nano-Scale

Alfano¹,

Pagnotta²,

Pantano

2011

NANOTEC

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In recent years, the development of cost-effective processing techniques, novel design concepts and new materials paved the way to a widespread diffusion of micro- and nano-electro-mechanical systems (NEMS/MEMS). Obviously, the reliability as well as the performance of NEMS/MEMS depend on the corresponding materials properties, which in turn should be determined using ad-hoc small samples fabricated at the relevant size-scale. For this reason, in the last decade research efforts have been devoted to the development of experimental techniques suitable for the mechanical characterization of materials at micro- and nano-scale. There are many contributions stemming from this research area, the purpose of the present work is to give an overview of the most recent patented works. The focus will be directed to selected patents on the mechanical characterization of both micro- and nanosamples, like nanotubes and nanowires. Special emphasis will be given to the methods suited for the determination of elastic properties, fracture resistance and residual stresses of materials.

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“…In Fig. 2, the stress-strain behaviour of NiTi (Buehler and Wang 1967) and single crystal silicon (Liu et al 2008) is shown.…”

Section: Designmentioning

confidence: 99%

Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials

Bolzmacher¹,

Bauer²,

Schmid

et al. 2010

Microsyst Technol

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In this work, amplification units made of robust metallic nickel titanium (NiTi) and single crystal silicon are compared and evaluated for the application in miniaturized piezoelectric actuators for flow control purposes. The amplification mechanism with a sliced membrane structure is based on a mechanical lever in order to amplify the low piezoelectrically induced deformation. Therefore, an enhanced output stroke can be provided up to high frequencies. The different membrane fabrication processes using laser ablation for the NiTi alloy and deep reactive ion etching for the silicon substrate, as well as the results of finite element simulations and experimental measurements are reported. An amplification factor of 9 has been achieved for an optimized load transmission point position. The dynamic response shows a quality factor of 25 and 494 at the first fundamental mode for NiTi and silicon membranes, respectively. Compared to silicon, NiTi shows enhanced properties against failure and facilitates the integration process.

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Dimension effect on mechanical behavior of silicon micro-cantilever beams

Cited by 48 publications

References 12 publications

Characterization of Microdevices by Nanoindentation

Characterization of Microdevices by Nanoindentation

A Review of Patented Works on the Mechanical Characterization of Materials at Micro- and Nano-Scale

Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials

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