1987
DOI: 10.1002/sca.4950090502
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Digital stereophotogrammetry for processing SEM Data

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Cited by 26 publications
(19 citation statements)
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“…Scanning electron microscopes can now be operated by digital scan generators with the signal level recorded at each pixel as a digital value. Such images in computer frame store can then be analysed automatically (Alff, 1987;Holburn and Smith, 1979;Koenig et al, 1987;Tovey, 1978). Software for automated analysis of stereopairs has been produced commercially (for example, by Link Systems, in the UK and Noran Instruments and Princeton Gamma Tech in the USA; the software sold by Link contains a specific solution to the resorption pit measurement problem).…”
Section: Automated Analysis Of Digital Scanning Electron Micrographsmentioning
confidence: 99%
“…Scanning electron microscopes can now be operated by digital scan generators with the signal level recorded at each pixel as a digital value. Such images in computer frame store can then be analysed automatically (Alff, 1987;Holburn and Smith, 1979;Koenig et al, 1987;Tovey, 1978). Software for automated analysis of stereopairs has been produced commercially (for example, by Link Systems, in the UK and Noran Instruments and Princeton Gamma Tech in the USA; the software sold by Link contains a specific solution to the resorption pit measurement problem).…”
Section: Automated Analysis Of Digital Scanning Electron Micrographsmentioning
confidence: 99%
“…In an attempt to rid the data of distorted values, points from the ice crystals were collected predominantly from the center 80% of photographs, where other distortions were observed to be negligible in micrographs of reference grids made under similar imaging conditions (Bastacky, unpublished data). Koenig et al (1987) took digital output from an SEM to an autocorrelation program. They, however, noticed that repeating structures such as microscope grids created problems for autocorrelation programs.…”
Section: Resultsmentioning
confidence: 99%
“…Early applications of the technique relied on traditional stereophotogrammetry practice with the stereo pairs being obtained by tilting the specimen stage (Boyde 1974). More recently, with the advent of low-cost computation, image correlation techniques have supplanted manual analysis, although the principle remains fundamentally unchanged (Koenig et al 1987, Kayaalp et al 1987) Specimen tilting presents some difficulties that renders it unsuitable for in siru height measurements. Due to mechanical imperfections in a eucentric stage, lateral movement of the specimen that can result in misregistration between a stereo image pair comprising highly regular micron-level structures (e.g., an array of memory cells in an integrated circuit) is inevitable.…”
Section: Introductionmentioning
confidence: 99%