Diffusion suppression of photolytic fragments on laser-induced chemical vapor deposition

Arai, Y.; Yamaguchi, Satoru; Ohsaki, T.

doi:10.1063/1.99581

Cited by 2 publications

(1 citation statement)

References 10 publications

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“…Adding Ar buffer gas during Al deposition, for example, can result in diffusion suppression resulting in narrower features. 25 Gas-Phase Particle Formation…”

Section: Photochemical Deposition and Cluster Formationmentioning

confidence: 99%

The role of mass transport in laser-induced chemistry

Kodas¹,

Comita²

1990

Acc. Chem. Res.

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The use of laser light to selectively drive chemical reactions on a micron scale is an extremely rapidly evolving technology. Laser light can be used as a source of local heating on a solid surface in order to accelerate surface reactions, or alternatively it can provide radiation of an appropriate wavelength to drive a photochemical reaction in a localized region, either above or Toivo Kodas received his Ph.D. with Sheldon Friedlander from the University of California, Los Angeles in 1986. He was a Visiting Scientist at IBM Research Division, Almaden Research Center in San Jose until 1988, when he joined the University of New Mexico as an assistant professor of chemical engineering. His research interests include photon-assisted processing of materials, chemical vapor deposition, processing of superconducting ceramics, and aerosol physics and chemistry. Paul B. Comita is presently a research staff member at IBM Almaden Research Center. He received his undergraduate degree in chemistry from Lawrence University in Appleton, WI, and he received his Ph.D. in chemistry from the University of California, Berkeley In 1981, for his work in the area of vibratlonally excited states and infrared laser multiphoton dissociation with Professor R. G. Bergman. After postdoctoral work at Stanford University with Professor John I, Brauman, he joined the IBM Research Division. His primary research interests are in the areas of laser-induced surface phenomena and laser diagnostic techniques.

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“…Adding Ar buffer gas during Al deposition, for example, can result in diffusion suppression resulting in narrower features. 25 Gas-Phase Particle Formation…”

Section: Photochemical Deposition and Cluster Formationmentioning

confidence: 99%

The role of mass transport in laser-induced chemistry

Kodas¹,

Comita²

1990

Acc. Chem. Res.

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Surface modification with lasers

Comita

1990

Advanced Materials

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Laser-induced processing has been widely exploited in the microelectronics industry to produce deposits with well-controlled chemical composition, feature size, and morphology. A brief survey of the most commonly used techniques for laser patterning of materials on surfaces is presented. The issues which are key to continued progress in the field of surface modification with lasers are examined, including laser heating of surfaces, the role of mass transport in the kinetics of deposit growth, the study of the surface reactions involved in laserinduced processes, and some aspects of materials properties which are important in surface modification techniques.

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Diffusion suppression of photolytic fragments on laser-induced chemical vapor deposition

Cited by 2 publications

References 10 publications

The role of mass transport in laser-induced chemistry

The role of mass transport in laser-induced chemistry

Surface modification with lasers

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