The surface roughness created by grit blast treatment affected diffusion bonding quality. The surface treatment is very important to remove the oxide films in combination with superplastic forming and diffusion bonding. Therefore, by using the superplastic magnesium alloys, the diffusion bonding tests carried out to obtain the relationship between the diffusion bonding quality and surface roughness. From the diffusion bonding results, in order to obtain high quality joining, the void shrinkage processes were not only diffusional controlled process but also plasticity controlled process. The optimal surface roughness was estimated equal to grain size.