“…This has been concluded from self-and foreign-atom diffusion studies 7,21,22,[27][28][29][30] and confirmed by atomistic calculations. 15,23,[30][31][32][33] In particular, the simultaneous diffusion of self-and dopant atoms in isotopically controlled Ge heterostructures have revealed that vacancies in Ge are mainly doubly negatively charged under intrinsic and n-type doping conditions. 7,34 However, the preferred charge state of V under p-type doping is not known.…”