Diffractive-refractive hybrid microscope objective for 193-nm inspection systems

Brunner, Róbert; Steiner, Reinhard; Rudolf, K; Dobschal, Hans-Juergen

doi:10.1117/12.498325

Cited by 22 publications

(8 citation statements)

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“…Commonly, monolithic gratings are gratings that are etched into transparent material, mostly Fused Silica, and contain no organic residues or resists. Holographic gratings can be produced on plane and curved (convex, concave or free-form shape) substrates [3][4][5][6][7][8][9][10][11][12][13]. Different spectrometer setups (e.g.…”

Section: Grating Manufacturing Processmentioning

confidence: 99%

Monolithic diffraction grating elements for remote sensing applications

et al. 2014

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A diffraction grating is one of the key-components of spectral imaging spectrometers. Spectral imaging systems lead to enhanced remote sensing properties when the sensing system provides sufficient spectral resolution to identify materials from its spectral reflectance signature. The performance of diffraction gratings provide an initial way to improve instrumental resolution. Thus, subsequent manufacturing techniques of high quality gratings are essential to significantly boost spectral performance. ZEISS has developed advanced fabrication techniques to manufacture monolithic, high groove density gratings with low stray light, high diffraction efficiency and low polarization sensitivity characteristic. Gratings at ZEISS can be generated holographically in combination with ion beam plasma etching to enhance the grating profile or made by using gray-scale laser lithography technology. Holographic recording in combination with plasma etching enable the fabrication of various grating profiles to optimize efficiency including polarization behavior. Typical profile shapes are blazed type gratings, sinusoidal profiles and binary profiles allowing to optimize efficiency and polarization requirements exactly towards the required spectral range. Holographic gratings can be fabricated on plane and curved (convex, concave or free-form shape) substrates. As grating manufacturing techniques continue to cope with the challenges of enhanced remote sensing capabilities, ZEISS also can pattern large-area diffraction gratings with high resolution in the visible and shortwave infrared by using gray-scale lithography.

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Section: Grating Manufacturing Processmentioning

confidence: 99%

Monolithic diffraction grating elements for remote sensing applications

et al. 2014

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“…Using scalar diffraction theory For the design of an optical system we have to consider also the stray-light, caused by the intensity of higher diffracted orders 10 . Our calculations of the intensity of higher diffracted orders show, that the intensity of the parasitic higher orders from polymer DOEs is considerable higher than the intensity diffracted from glass DOEs.…”

Section: Fundamentals Of Doe Simulationmentioning

confidence: 99%

Diffractive optical elements fabricated by precise pressing of glass

2007

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This paper discusses the precise pressing technology for the fabrication of diffractive optical elements (DOEs). The new established fabrication process allows mass production of DOEs in high homogeneous optical glasses. Our precise pressing process guarantees a very constant quality over the complete production chain. Glass DOEs made by SCHOTT AG are planar optical phase elements with highly accurate shape and efficiency. The blazed profile of the diffractive optical elements was approximated by a stepped profile with up to sixteen phase levels. The highest measured diffraction efficiency for sixteen level gratings was 95 %.

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“…Ghost images can be critical, especially in metrology applications. Nevertheless, successful systems have been presented for demanding applications like eyepieces [13][14][15] or microscopy [16]. Design strategies like the combination of strong diffractive elements and successful geometrical blocking at least of parts of unwanted orders help to cope with the drawbacks of diffractive lenses and allow for overall high performance.…”

Section: Introduction To Hybrid (Diffractive/refractive) Optics Designmentioning

confidence: 99%

Diffractive/refractive (hybrid) UV-imaging system for minimally invasive metrology: design, performance, and application experiments

et al. 2012

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A hybrid imaging system was developed to enable the application of laser-based measurement techniques like UV laser-induced fluorescence in near-production engines with small access ports. For this task, wide-angle characteristics and high lens speed are required in combination with small engine-bound optics able to survive in harsh environmental conditions. Our approach combines a simple and robust access lens with refractive/diffractive (hybrid) imaging stages away from the engine that are customized for individual wavelength bands. We give a detailed insight into the design strategy, including the integration of diffractive optics and the performance of the system with analysis of the modulation transfer function (MTF), lens speed, and stray light. Finally, results from applications in an actual engine are shown.

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Diffractive-refractive hybrid microscope objective for 193-nm inspection systems

Cited by 22 publications

References 0 publications

Monolithic diffraction grating elements for remote sensing applications

Monolithic diffraction grating elements for remote sensing applications

Diffractive optical elements fabricated by precise pressing of glass

Diffractive/refractive (hybrid) UV-imaging system for minimally invasive metrology: design, performance, and application experiments

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